3/26/2011	9:49:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	9:49:49 AM	Recipe started at 9:49 AM
3/26/2011	9:49:50 AM	Helium valve closed
3/26/2011	9:49:50 AM	H2 valve closed
3/26/2011	9:49:50 AM	BCl3 valve closed
3/26/2011	9:49:50 AM	PH3 valve closed
3/26/2011	9:49:50 AM	SiCl4 pre valve closed
3/26/2011	9:49:50 AM	SiCl4 post valve closed
3/26/2011	9:49:50 AM	Main Vac valve closed
3/26/2011	9:49:50 AM	Bubbler valve closed
3/26/2011	9:49:50 AM	Bypass valve opened
3/26/2011	9:49:50 AM	Helium MFC set to  0.000000
3/26/2011	9:49:50 AM	H2 MFC set to  0.000000
3/26/2011	9:49:50 AM	BCl3 MFC set to  0.000000
3/26/2011	9:49:50 AM	PHl3 MFC set to  0.000000
3/26/2011	9:49:50 AM	SiCl4 MFC set to  0.000000
3/26/2011	9:49:50 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	9:49:50 AM	Tube furnace set to 0
3/26/2011	9:49:50 AM	Helium valve closed
3/26/2011	9:49:50 AM	H2 valve closed
3/26/2011	9:49:50 AM	BCl3 valve closed
3/26/2011	9:49:50 AM	PH3 valve closed
3/26/2011	9:49:50 AM	SiCl4 pre valve closed
3/26/2011	9:49:50 AM	SiCl4 post valve closed
3/26/2011	9:49:50 AM	Bubbler valve closed
3/26/2011	9:49:50 AM	Main Vac valve opened
3/26/2011	9:49:50 AM	Bypass valve opened
3/26/2011	9:49:50 AM	Helium MFC set to  0.000000
3/26/2011	9:49:50 AM	H2 MFC set to  0.000000
3/26/2011	9:49:50 AM	BCl3 MFC set to  0.000000
3/26/2011	9:49:50 AM	PHl3 MFC set to  0.000000
3/26/2011	9:49:50 AM	SiCl4 MFC set to  0.000000
3/26/2011	9:49:50 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	9:49:50 AM	Tube furnace set to 0
3/26/2011	9:49:51 AM	Run finished at 9:49 AM
3/26/2011	9:49:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	9:49:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/26/2011	9:49:54 AM	Recipe started at 9:49 AM
3/26/2011	9:49:54 AM	H2 valve closed
3/26/2011	9:49:54 AM	BCl3 valve closed
3/26/2011	9:49:54 AM	PH3 valve closed
3/26/2011	9:49:54 AM	SiCl4 pre valve closed
3/26/2011	9:49:54 AM	SiCl4 post valve closed
3/26/2011	9:49:54 AM	Main Vac valve closed
3/26/2011	9:49:54 AM	Bypass valve closed
3/26/2011	9:49:54 AM	Bubbler valve closed
3/26/2011	9:49:54 AM	Helium valve opened
3/26/2011	9:49:54 AM	Helium MFC set to  500.000000
3/26/2011	9:49:54 AM	H2 MFC set to  0.000000
3/26/2011	9:49:54 AM	BCl3 MFC set to  0.000000
3/26/2011	9:49:54 AM	PHl3 MFC set to  0.000000
3/26/2011	9:49:54 AM	SiCl4 MFC set to  0.000000
3/26/2011	9:49:54 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	9:49:54 AM	Tube furnace set to 0
3/26/2011	9:51:15 AM	Helium valve closed
3/26/2011	9:51:15 AM	H2 valve closed
3/26/2011	9:51:15 AM	BCl3 valve closed
3/26/2011	9:51:15 AM	PH3 valve closed
3/26/2011	9:51:15 AM	SiCl4 pre valve closed
3/26/2011	9:51:15 AM	SiCl4 post valve closed
3/26/2011	9:51:15 AM	Main Vac valve closed
3/26/2011	9:51:15 AM	Bypass valve closed
3/26/2011	9:51:15 AM	Bubbler valve closed
3/26/2011	9:51:15 AM	Helium MFC set to  0.000000
3/26/2011	9:51:15 AM	H2 MFC set to  0.000000
3/26/2011	9:51:15 AM	BCl3 MFC set to  0.000000
3/26/2011	9:51:15 AM	PHl3 MFC set to  0.000000
3/26/2011	9:51:15 AM	SiCl4 MFC set to  0.000000
3/26/2011	9:51:15 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	9:51:15 AM	Tube furnace set to 0
3/26/2011	9:51:16 AM	Run finished at 9:51 AM
3/26/2011	9:51:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/26/2011	10:02:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	10:02:44 AM	Recipe started at 10:02 AM
3/26/2011	10:02:44 AM	Helium valve closed
3/26/2011	10:02:44 AM	H2 valve closed
3/26/2011	10:02:44 AM	BCl3 valve closed
3/26/2011	10:02:44 AM	PH3 valve closed
3/26/2011	10:02:44 AM	SiCl4 pre valve closed
3/26/2011	10:02:44 AM	SiCl4 post valve closed
3/26/2011	10:02:44 AM	Main Vac valve closed
3/26/2011	10:02:44 AM	Bubbler valve closed
3/26/2011	10:02:44 AM	Bypass valve opened
3/26/2011	10:02:44 AM	Helium MFC set to  0.000000
3/26/2011	10:02:44 AM	H2 MFC set to  0.000000
3/26/2011	10:02:44 AM	BCl3 MFC set to  0.000000
3/26/2011	10:02:44 AM	PHl3 MFC set to  0.000000
3/26/2011	10:02:45 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:02:45 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:02:45 AM	Tube furnace set to 0
3/26/2011	10:04:08 AM	Run aborted at 10:04 AM
3/26/2011	10:04:08 AM	Helium valve closed
3/26/2011	10:04:08 AM	H2 valve closed
3/26/2011	10:04:08 AM	BCl3 valve closed
3/26/2011	10:04:08 AM	PH3 valve closed
3/26/2011	10:04:08 AM	SiCl4 pre valve closed
3/26/2011	10:04:08 AM	SiCl4 post valve closed
3/26/2011	10:04:08 AM	Bypass valve closed
3/26/2011	10:04:08 AM	Main Vac valve closed
3/26/2011	10:04:08 AM	Bubbler valve closed
3/26/2011	10:04:08 AM	Helium MFC set to  0.000000
3/26/2011	10:04:08 AM	H2 MFC set to  0.000000
3/26/2011	10:04:08 AM	BCl3 MFC set to  0.000000
3/26/2011	10:04:08 AM	PHl3 MFC set to  0.000000
3/26/2011	10:04:08 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:04:08 AM	Tube furnace set to 0
3/26/2011	10:04:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	10:05:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	10:05:31 AM	Recipe started at 10:05 AM
3/26/2011	10:05:31 AM	Helium valve closed
3/26/2011	10:05:31 AM	H2 valve closed
3/26/2011	10:05:31 AM	BCl3 valve closed
3/26/2011	10:05:31 AM	PH3 valve closed
3/26/2011	10:05:31 AM	SiCl4 pre valve closed
3/26/2011	10:05:31 AM	SiCl4 post valve closed
3/26/2011	10:05:31 AM	Main Vac valve closed
3/26/2011	10:05:31 AM	Bubbler valve closed
3/26/2011	10:05:31 AM	Bypass valve opened
3/26/2011	10:05:31 AM	Helium MFC set to  0.000000
3/26/2011	10:05:31 AM	H2 MFC set to  0.000000
3/26/2011	10:05:31 AM	BCl3 MFC set to  0.000000
3/26/2011	10:05:31 AM	PHl3 MFC set to  0.000000
3/26/2011	10:05:31 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:05:31 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:05:32 AM	Tube furnace set to 0
3/26/2011	10:06:00 AM	Run aborted at 10:06 AM
3/26/2011	10:06:00 AM	Helium valve closed
3/26/2011	10:06:00 AM	H2 valve closed
3/26/2011	10:06:00 AM	BCl3 valve closed
3/26/2011	10:06:00 AM	PH3 valve closed
3/26/2011	10:06:00 AM	SiCl4 pre valve closed
3/26/2011	10:06:00 AM	SiCl4 post valve closed
3/26/2011	10:06:00 AM	Bypass valve closed
3/26/2011	10:06:00 AM	Main Vac valve closed
3/26/2011	10:06:00 AM	Bubbler valve closed
3/26/2011	10:06:00 AM	Helium MFC set to  0.000000
3/26/2011	10:06:00 AM	H2 MFC set to  0.000000
3/26/2011	10:06:00 AM	BCl3 MFC set to  0.000000
3/26/2011	10:06:00 AM	PHl3 MFC set to  0.000000
3/26/2011	10:06:00 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:06:00 AM	Tube furnace set to 0
3/26/2011	10:06:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	10:06:17 AM	Bypass valve opened
3/26/2011	10:06:23 AM	Bypass valve closed
3/26/2011	10:08:14 AM	Bypass valve opened
3/26/2011	10:08:16 AM	Bypass valve closed
3/26/2011	10:18:55 AM	Bypass valve opened
3/26/2011	10:18:58 AM	Bypass valve closed
3/26/2011	10:26:48 AM	Bypass valve opened
3/26/2011	10:26:49 AM	Bypass valve closed
3/26/2011	10:27:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	10:27:35 AM	Recipe started at 10:27 AM
3/26/2011	10:27:35 AM	Helium valve closed
3/26/2011	10:27:35 AM	H2 valve closed
3/26/2011	10:27:35 AM	BCl3 valve closed
3/26/2011	10:27:35 AM	PH3 valve closed
3/26/2011	10:27:35 AM	SiCl4 pre valve closed
3/26/2011	10:27:35 AM	SiCl4 post valve closed
3/26/2011	10:27:35 AM	Main Vac valve closed
3/26/2011	10:27:35 AM	Bubbler valve closed
3/26/2011	10:27:35 AM	Bypass valve opened
3/26/2011	10:27:35 AM	Helium MFC set to  0.000000
3/26/2011	10:27:35 AM	H2 MFC set to  0.000000
3/26/2011	10:27:35 AM	BCl3 MFC set to  0.000000
3/26/2011	10:27:35 AM	PHl3 MFC set to  0.000000
3/26/2011	10:27:35 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:27:35 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:27:35 AM	Tube furnace set to 0
3/26/2011	10:28:12 AM	Helium valve closed
3/26/2011	10:28:12 AM	H2 valve closed
3/26/2011	10:28:12 AM	BCl3 valve closed
3/26/2011	10:28:12 AM	PH3 valve closed
3/26/2011	10:28:12 AM	SiCl4 pre valve closed
3/26/2011	10:28:12 AM	SiCl4 post valve closed
3/26/2011	10:28:12 AM	Bubbler valve closed
3/26/2011	10:28:12 AM	Main Vac valve opened
3/26/2011	10:28:12 AM	Bypass valve opened
3/26/2011	10:28:12 AM	Helium MFC set to  0.000000
3/26/2011	10:28:12 AM	H2 MFC set to  0.000000
3/26/2011	10:28:12 AM	BCl3 MFC set to  0.000000
3/26/2011	10:28:12 AM	PHl3 MFC set to  0.000000
3/26/2011	10:28:12 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:28:12 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:28:13 AM	Tube furnace set to 0
3/26/2011	10:28:13 AM	Run finished at 10:28 AM
3/26/2011	10:28:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	10:29:04 AM	Bypass valve closed
3/26/2011	10:29:06 AM	Bypass valve opened
3/26/2011	10:29:07 AM	Main Vac valve closed
3/26/2011	10:29:09 AM	Bypass valve closed
3/26/2011	10:29:16 AM	Bypass valve opened
3/26/2011	10:29:18 AM	Main Vac valve opened
3/26/2011	10:30:14 AM	Main Vac valve closed
3/26/2011	10:30:16 AM	Bypass valve closed
3/26/2011	10:30:24 AM	Bypass valve opened
3/26/2011	10:30:24 AM	Main Vac valve opened
3/26/2011	10:30:41 AM	Tube furnace set to 400
3/26/2011	10:31:46 AM	Main Vac valve closed
3/26/2011	10:31:48 AM	Bypass valve closed
3/26/2011	10:32:09 AM	Bypass valve opened
3/26/2011	10:32:11 AM	Main Vac valve opened
3/26/2011	10:32:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/26/2011	10:32:46 AM	Recipe started at 10:32 AM
3/26/2011	10:32:46 AM	Helium valve closed
3/26/2011	10:32:46 AM	H2 valve closed
3/26/2011	10:32:46 AM	BCl3 valve closed
3/26/2011	10:32:46 AM	PH3 valve closed
3/26/2011	10:32:46 AM	SiCl4 pre valve closed
3/26/2011	10:32:46 AM	SiCl4 post valve closed
3/26/2011	10:32:46 AM	Main Vac valve closed
3/26/2011	10:32:46 AM	Bubbler valve closed
3/26/2011	10:32:46 AM	Bypass valve opened
3/26/2011	10:32:46 AM	Helium MFC set to  0.000000
3/26/2011	10:32:46 AM	H2 MFC set to  0.000000
3/26/2011	10:32:46 AM	BCl3 MFC set to  0.000000
3/26/2011	10:32:46 AM	PHl3 MFC set to  0.000000
3/26/2011	10:32:46 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:32:46 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:32:46 AM	Tube furnace set to 0
3/26/2011	10:32:46 AM	Helium valve closed
3/26/2011	10:32:46 AM	H2 valve closed
3/26/2011	10:32:46 AM	BCl3 valve closed
3/26/2011	10:32:46 AM	PH3 valve closed
3/26/2011	10:32:46 AM	SiCl4 pre valve closed
3/26/2011	10:32:46 AM	SiCl4 post valve closed
3/26/2011	10:32:46 AM	Bubbler valve closed
3/26/2011	10:32:46 AM	Main Vac valve opened
3/26/2011	10:32:46 AM	Bypass valve opened
3/26/2011	10:32:46 AM	Helium MFC set to  0.000000
3/26/2011	10:32:46 AM	H2 MFC set to  0.000000
3/26/2011	10:32:46 AM	BCl3 MFC set to  0.000000
3/26/2011	10:32:46 AM	PHl3 MFC set to  0.000000
3/26/2011	10:32:46 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:32:46 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:32:46 AM	Tube furnace set to 0
3/26/2011	10:33:46 AM	H2 valve closed
3/26/2011	10:33:46 AM	BCl3 valve closed
3/26/2011	10:33:46 AM	PH3 valve closed
3/26/2011	10:33:46 AM	SiCl4 pre valve closed
3/26/2011	10:33:46 AM	SiCl4 post valve closed
3/26/2011	10:33:46 AM	Bubbler valve closed
3/26/2011	10:33:46 AM	Helium valve opened
3/26/2011	10:33:46 AM	Main Vac valve opened
3/26/2011	10:33:46 AM	Bypass valve opened
3/26/2011	10:33:46 AM	Helium MFC set to  100.000000
3/26/2011	10:33:46 AM	H2 MFC set to  0.000000
3/26/2011	10:33:46 AM	BCl3 MFC set to  0.000000
3/26/2011	10:33:46 AM	PHl3 MFC set to  0.000000
3/26/2011	10:33:46 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:33:46 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:33:46 AM	Tube furnace set to 0
3/26/2011	10:34:46 AM	Helium valve closed
3/26/2011	10:34:46 AM	H2 valve closed
3/26/2011	10:34:46 AM	BCl3 valve closed
3/26/2011	10:34:46 AM	PH3 valve closed
3/26/2011	10:34:46 AM	SiCl4 pre valve closed
3/26/2011	10:34:46 AM	SiCl4 post valve closed
3/26/2011	10:34:46 AM	Bubbler valve closed
3/26/2011	10:34:46 AM	Main Vac valve opened
3/26/2011	10:34:46 AM	Bypass valve opened
3/26/2011	10:34:46 AM	Helium MFC set to  0.000000
3/26/2011	10:34:46 AM	H2 MFC set to  0.000000
3/26/2011	10:34:46 AM	BCl3 MFC set to  0.000000
3/26/2011	10:34:46 AM	PHl3 MFC set to  0.000000
3/26/2011	10:34:46 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:34:46 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:34:47 AM	Tube furnace set to 0
3/26/2011	10:35:47 AM	H2 valve closed
3/26/2011	10:35:47 AM	BCl3 valve closed
3/26/2011	10:35:47 AM	PH3 valve closed
3/26/2011	10:35:47 AM	SiCl4 pre valve closed
3/26/2011	10:35:47 AM	SiCl4 post valve closed
3/26/2011	10:35:47 AM	Bubbler valve closed
3/26/2011	10:35:47 AM	Helium valve opened
3/26/2011	10:35:47 AM	Main Vac valve opened
3/26/2011	10:35:47 AM	Bypass valve opened
3/26/2011	10:35:47 AM	Helium MFC set to  100.000000
3/26/2011	10:35:47 AM	H2 MFC set to  0.000000
3/26/2011	10:35:47 AM	BCl3 MFC set to  0.000000
3/26/2011	10:35:47 AM	PHl3 MFC set to  0.000000
3/26/2011	10:35:47 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:35:47 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:35:47 AM	Tube furnace set to 0
3/26/2011	10:36:47 AM	Helium valve closed
3/26/2011	10:36:47 AM	H2 valve closed
3/26/2011	10:36:47 AM	BCl3 valve closed
3/26/2011	10:36:47 AM	PH3 valve closed
3/26/2011	10:36:47 AM	SiCl4 pre valve closed
3/26/2011	10:36:47 AM	SiCl4 post valve closed
3/26/2011	10:36:47 AM	Bubbler valve closed
3/26/2011	10:36:47 AM	Main Vac valve opened
3/26/2011	10:36:47 AM	Bypass valve opened
3/26/2011	10:36:47 AM	Helium MFC set to  0.000000
3/26/2011	10:36:47 AM	H2 MFC set to  0.000000
3/26/2011	10:36:47 AM	BCl3 MFC set to  0.000000
3/26/2011	10:36:47 AM	PHl3 MFC set to  0.000000
3/26/2011	10:36:47 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:36:47 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:36:47 AM	Tube furnace set to 0
3/26/2011	10:37:47 AM	H2 valve closed
3/26/2011	10:37:47 AM	BCl3 valve closed
3/26/2011	10:37:47 AM	PH3 valve closed
3/26/2011	10:37:47 AM	SiCl4 pre valve closed
3/26/2011	10:37:47 AM	SiCl4 post valve closed
3/26/2011	10:37:47 AM	Bubbler valve closed
3/26/2011	10:37:47 AM	Helium valve opened
3/26/2011	10:37:47 AM	Main Vac valve opened
3/26/2011	10:37:47 AM	Bypass valve opened
3/26/2011	10:37:47 AM	Helium MFC set to  100.000000
3/26/2011	10:37:47 AM	H2 MFC set to  0.000000
3/26/2011	10:37:47 AM	BCl3 MFC set to  0.000000
3/26/2011	10:37:47 AM	PHl3 MFC set to  0.000000
3/26/2011	10:37:47 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:37:47 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:37:47 AM	Tube furnace set to 0
3/26/2011	10:38:47 AM	Helium valve closed
3/26/2011	10:38:47 AM	H2 valve closed
3/26/2011	10:38:47 AM	BCl3 valve closed
3/26/2011	10:38:47 AM	PH3 valve closed
3/26/2011	10:38:47 AM	SiCl4 pre valve closed
3/26/2011	10:38:47 AM	SiCl4 post valve closed
3/26/2011	10:38:47 AM	Bubbler valve closed
3/26/2011	10:38:47 AM	Main Vac valve opened
3/26/2011	10:38:47 AM	Bypass valve opened
3/26/2011	10:38:47 AM	Helium MFC set to  0.000000
3/26/2011	10:38:47 AM	H2 MFC set to  0.000000
3/26/2011	10:38:47 AM	BCl3 MFC set to  0.000000
3/26/2011	10:38:47 AM	PHl3 MFC set to  0.000000
3/26/2011	10:38:47 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:38:47 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:38:47 AM	Tube furnace set to 0
3/26/2011	10:39:48 AM	H2 valve closed
3/26/2011	10:39:48 AM	BCl3 valve closed
3/26/2011	10:39:48 AM	PH3 valve closed
3/26/2011	10:39:48 AM	SiCl4 pre valve closed
3/26/2011	10:39:48 AM	SiCl4 post valve closed
3/26/2011	10:39:48 AM	Bubbler valve closed
3/26/2011	10:39:48 AM	Helium valve opened
3/26/2011	10:39:48 AM	Main Vac valve opened
3/26/2011	10:39:48 AM	Bypass valve opened
3/26/2011	10:39:48 AM	Helium MFC set to  100.000000
3/26/2011	10:39:48 AM	H2 MFC set to  0.000000
3/26/2011	10:39:48 AM	BCl3 MFC set to  0.000000
3/26/2011	10:39:48 AM	PHl3 MFC set to  0.000000
3/26/2011	10:39:48 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:39:48 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:39:48 AM	Tube furnace set to 0
3/26/2011	10:40:48 AM	Helium valve closed
3/26/2011	10:40:48 AM	H2 valve closed
3/26/2011	10:40:48 AM	BCl3 valve closed
3/26/2011	10:40:48 AM	PH3 valve closed
3/26/2011	10:40:48 AM	SiCl4 pre valve closed
3/26/2011	10:40:48 AM	SiCl4 post valve closed
3/26/2011	10:40:48 AM	Bubbler valve closed
3/26/2011	10:40:48 AM	Main Vac valve opened
3/26/2011	10:40:48 AM	Bypass valve opened
3/26/2011	10:40:48 AM	Helium MFC set to  0.000000
3/26/2011	10:40:48 AM	H2 MFC set to  0.000000
3/26/2011	10:40:48 AM	BCl3 MFC set to  0.000000
3/26/2011	10:40:48 AM	PHl3 MFC set to  0.000000
3/26/2011	10:40:48 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:40:48 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:40:48 AM	Tube furnace set to 0
3/26/2011	10:41:48 AM	H2 valve closed
3/26/2011	10:41:48 AM	BCl3 valve closed
3/26/2011	10:41:48 AM	PH3 valve closed
3/26/2011	10:41:48 AM	SiCl4 pre valve closed
3/26/2011	10:41:48 AM	SiCl4 post valve closed
3/26/2011	10:41:48 AM	Bubbler valve closed
3/26/2011	10:41:48 AM	Helium valve opened
3/26/2011	10:41:48 AM	Main Vac valve opened
3/26/2011	10:41:48 AM	Bypass valve opened
3/26/2011	10:41:48 AM	Helium MFC set to  100.000000
3/26/2011	10:41:48 AM	H2 MFC set to  0.000000
3/26/2011	10:41:48 AM	BCl3 MFC set to  0.000000
3/26/2011	10:41:48 AM	PHl3 MFC set to  0.000000
3/26/2011	10:41:48 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:41:48 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:41:48 AM	Tube furnace set to 0
3/26/2011	10:42:48 AM	Helium valve closed
3/26/2011	10:42:48 AM	H2 valve closed
3/26/2011	10:42:48 AM	BCl3 valve closed
3/26/2011	10:42:48 AM	PH3 valve closed
3/26/2011	10:42:48 AM	SiCl4 pre valve closed
3/26/2011	10:42:48 AM	SiCl4 post valve closed
3/26/2011	10:42:48 AM	Bubbler valve closed
3/26/2011	10:42:48 AM	Main Vac valve opened
3/26/2011	10:42:48 AM	Bypass valve opened
3/26/2011	10:42:48 AM	Helium MFC set to  0.000000
3/26/2011	10:42:48 AM	H2 MFC set to  0.000000
3/26/2011	10:42:48 AM	BCl3 MFC set to  0.000000
3/26/2011	10:42:48 AM	PHl3 MFC set to  0.000000
3/26/2011	10:42:48 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:42:48 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:42:48 AM	Tube furnace set to 0
3/26/2011	10:43:48 AM	H2 valve closed
3/26/2011	10:43:48 AM	BCl3 valve closed
3/26/2011	10:43:48 AM	PH3 valve closed
3/26/2011	10:43:48 AM	SiCl4 pre valve closed
3/26/2011	10:43:48 AM	SiCl4 post valve closed
3/26/2011	10:43:48 AM	Bubbler valve closed
3/26/2011	10:43:48 AM	Helium valve opened
3/26/2011	10:43:48 AM	Main Vac valve opened
3/26/2011	10:43:48 AM	Bypass valve opened
3/26/2011	10:43:48 AM	Helium MFC set to  100.000000
3/26/2011	10:43:48 AM	H2 MFC set to  0.000000
3/26/2011	10:43:48 AM	BCl3 MFC set to  0.000000
3/26/2011	10:43:48 AM	PHl3 MFC set to  0.000000
3/26/2011	10:43:48 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:43:48 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:43:48 AM	Tube furnace set to 0
3/26/2011	10:44:48 AM	Helium valve closed
3/26/2011	10:44:48 AM	H2 valve closed
3/26/2011	10:44:48 AM	BCl3 valve closed
3/26/2011	10:44:48 AM	PH3 valve closed
3/26/2011	10:44:48 AM	SiCl4 pre valve closed
3/26/2011	10:44:49 AM	SiCl4 post valve closed
3/26/2011	10:44:49 AM	Bubbler valve closed
3/26/2011	10:44:49 AM	Main Vac valve opened
3/26/2011	10:44:49 AM	Bypass valve opened
3/26/2011	10:44:49 AM	Helium MFC set to  0.000000
3/26/2011	10:44:49 AM	H2 MFC set to  0.000000
3/26/2011	10:44:49 AM	BCl3 MFC set to  0.000000
3/26/2011	10:44:49 AM	PHl3 MFC set to  0.000000
3/26/2011	10:44:49 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:44:49 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:44:49 AM	Tube furnace set to 0
3/26/2011	10:45:49 AM	H2 valve closed
3/26/2011	10:45:49 AM	BCl3 valve closed
3/26/2011	10:45:49 AM	PH3 valve closed
3/26/2011	10:45:49 AM	SiCl4 pre valve closed
3/26/2011	10:45:49 AM	SiCl4 post valve closed
3/26/2011	10:45:49 AM	Bubbler valve closed
3/26/2011	10:45:49 AM	Helium valve opened
3/26/2011	10:45:49 AM	Main Vac valve opened
3/26/2011	10:45:49 AM	Bypass valve opened
3/26/2011	10:45:49 AM	Helium MFC set to  100.000000
3/26/2011	10:45:49 AM	H2 MFC set to  0.000000
3/26/2011	10:45:49 AM	BCl3 MFC set to  0.000000
3/26/2011	10:45:49 AM	PHl3 MFC set to  0.000000
3/26/2011	10:45:49 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:45:49 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:45:49 AM	Tube furnace set to 0
3/26/2011	10:46:49 AM	Helium valve closed
3/26/2011	10:46:49 AM	H2 valve closed
3/26/2011	10:46:49 AM	BCl3 valve closed
3/26/2011	10:46:49 AM	PH3 valve closed
3/26/2011	10:46:49 AM	SiCl4 pre valve closed
3/26/2011	10:46:49 AM	SiCl4 post valve closed
3/26/2011	10:46:49 AM	Bubbler valve closed
3/26/2011	10:46:49 AM	Main Vac valve opened
3/26/2011	10:46:49 AM	Bypass valve opened
3/26/2011	10:46:49 AM	Helium MFC set to  0.000000
3/26/2011	10:46:49 AM	H2 MFC set to  0.000000
3/26/2011	10:46:49 AM	BCl3 MFC set to  0.000000
3/26/2011	10:46:49 AM	PHl3 MFC set to  0.000000
3/26/2011	10:46:49 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:46:49 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:46:49 AM	Tube furnace set to 0
3/26/2011	10:47:49 AM	H2 valve closed
3/26/2011	10:47:49 AM	BCl3 valve closed
3/26/2011	10:47:49 AM	PH3 valve closed
3/26/2011	10:47:49 AM	SiCl4 pre valve closed
3/26/2011	10:47:49 AM	SiCl4 post valve closed
3/26/2011	10:47:49 AM	Bubbler valve closed
3/26/2011	10:47:49 AM	Helium valve opened
3/26/2011	10:47:49 AM	Main Vac valve opened
3/26/2011	10:47:49 AM	Bypass valve opened
3/26/2011	10:47:49 AM	Helium MFC set to  100.000000
3/26/2011	10:47:49 AM	H2 MFC set to  0.000000
3/26/2011	10:47:49 AM	BCl3 MFC set to  0.000000
3/26/2011	10:47:49 AM	PHl3 MFC set to  0.000000
3/26/2011	10:47:49 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:47:49 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:47:49 AM	Tube furnace set to 0
3/26/2011	10:48:49 AM	Helium valve closed
3/26/2011	10:48:49 AM	H2 valve closed
3/26/2011	10:48:49 AM	BCl3 valve closed
3/26/2011	10:48:49 AM	PH3 valve closed
3/26/2011	10:48:49 AM	SiCl4 pre valve closed
3/26/2011	10:48:49 AM	SiCl4 post valve closed
3/26/2011	10:48:49 AM	Bubbler valve closed
3/26/2011	10:48:49 AM	Main Vac valve opened
3/26/2011	10:48:49 AM	Bypass valve opened
3/26/2011	10:48:49 AM	Helium MFC set to  0.000000
3/26/2011	10:48:49 AM	H2 MFC set to  0.000000
3/26/2011	10:48:49 AM	BCl3 MFC set to  0.000000
3/26/2011	10:48:49 AM	PHl3 MFC set to  0.000000
3/26/2011	10:48:49 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:48:49 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:48:49 AM	Tube furnace set to 0
3/26/2011	10:49:49 AM	H2 valve closed
3/26/2011	10:49:49 AM	BCl3 valve closed
3/26/2011	10:49:49 AM	PH3 valve closed
3/26/2011	10:49:49 AM	SiCl4 pre valve closed
3/26/2011	10:49:49 AM	SiCl4 post valve closed
3/26/2011	10:49:49 AM	Bubbler valve closed
3/26/2011	10:49:49 AM	Helium valve opened
3/26/2011	10:49:49 AM	Main Vac valve opened
3/26/2011	10:49:49 AM	Bypass valve opened
3/26/2011	10:49:49 AM	Helium MFC set to  100.000000
3/26/2011	10:49:49 AM	H2 MFC set to  0.000000
3/26/2011	10:49:49 AM	BCl3 MFC set to  0.000000
3/26/2011	10:49:49 AM	PHl3 MFC set to  0.000000
3/26/2011	10:49:49 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:49:49 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:49:50 AM	Tube furnace set to 0
3/26/2011	10:50:50 AM	Helium valve closed
3/26/2011	10:50:50 AM	H2 valve closed
3/26/2011	10:50:50 AM	BCl3 valve closed
3/26/2011	10:50:50 AM	PH3 valve closed
3/26/2011	10:50:50 AM	SiCl4 pre valve closed
3/26/2011	10:50:50 AM	SiCl4 post valve closed
3/26/2011	10:50:50 AM	Bubbler valve closed
3/26/2011	10:50:50 AM	Main Vac valve opened
3/26/2011	10:50:50 AM	Bypass valve opened
3/26/2011	10:50:50 AM	Helium MFC set to  0.000000
3/26/2011	10:50:50 AM	H2 MFC set to  0.000000
3/26/2011	10:50:50 AM	BCl3 MFC set to  0.000000
3/26/2011	10:50:50 AM	PHl3 MFC set to  0.000000
3/26/2011	10:50:50 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:50:50 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:50:50 AM	Tube furnace set to 0
3/26/2011	10:51:50 AM	H2 valve closed
3/26/2011	10:51:50 AM	BCl3 valve closed
3/26/2011	10:51:50 AM	PH3 valve closed
3/26/2011	10:51:50 AM	SiCl4 pre valve closed
3/26/2011	10:51:50 AM	SiCl4 post valve closed
3/26/2011	10:51:50 AM	Bubbler valve closed
3/26/2011	10:51:50 AM	Helium valve opened
3/26/2011	10:51:50 AM	Main Vac valve opened
3/26/2011	10:51:50 AM	Bypass valve opened
3/26/2011	10:51:50 AM	Helium MFC set to  100.000000
3/26/2011	10:51:50 AM	H2 MFC set to  0.000000
3/26/2011	10:51:50 AM	BCl3 MFC set to  0.000000
3/26/2011	10:51:50 AM	PHl3 MFC set to  0.000000
3/26/2011	10:51:50 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:51:50 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:51:50 AM	Tube furnace set to 0
3/26/2011	10:52:50 AM	Helium valve closed
3/26/2011	10:52:50 AM	H2 valve closed
3/26/2011	10:52:50 AM	BCl3 valve closed
3/26/2011	10:52:50 AM	PH3 valve closed
3/26/2011	10:52:50 AM	SiCl4 pre valve closed
3/26/2011	10:52:50 AM	SiCl4 post valve closed
3/26/2011	10:52:50 AM	Bubbler valve closed
3/26/2011	10:52:50 AM	Main Vac valve opened
3/26/2011	10:52:50 AM	Bypass valve opened
3/26/2011	10:52:50 AM	Helium MFC set to  0.000000
3/26/2011	10:52:50 AM	H2 MFC set to  0.000000
3/26/2011	10:52:50 AM	BCl3 MFC set to  0.000000
3/26/2011	10:52:50 AM	PHl3 MFC set to  0.000000
3/26/2011	10:52:50 AM	SiCl4 MFC set to  0.000000
3/26/2011	10:52:50 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	10:52:50 AM	Tube furnace set to 0
3/26/2011	10:52:51 AM	Run finished at 10:52 AM
3/26/2011	10:52:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/26/2011	11:04:10 AM	Main Vac valve closed
3/26/2011	11:04:12 AM	Bypass valve closed
3/26/2011	11:05:07 AM	Bypass valve opened
3/26/2011	11:05:09 AM	Main Vac valve opened
3/26/2011	11:05:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/26/2011	11:05:37 AM	Recipe started at 11:05 AM
3/26/2011	11:05:37 AM	Helium valve closed
3/26/2011	11:05:37 AM	H2 valve closed
3/26/2011	11:05:37 AM	BCl3 valve closed
3/26/2011	11:05:37 AM	PH3 valve closed
3/26/2011	11:05:37 AM	SiCl4 pre valve closed
3/26/2011	11:05:37 AM	SiCl4 post valve closed
3/26/2011	11:05:37 AM	Main Vac valve closed
3/26/2011	11:05:37 AM	Bubbler valve closed
3/26/2011	11:05:37 AM	Bypass valve opened
3/26/2011	11:05:37 AM	Helium MFC set to  0.000000
3/26/2011	11:05:37 AM	H2 MFC set to  0.000000
3/26/2011	11:05:37 AM	BCl3 MFC set to  0.000000
3/26/2011	11:05:37 AM	PHl3 MFC set to  0.000000
3/26/2011	11:05:37 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:05:37 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:05:37 AM	Tube furnace set to 0
3/26/2011	11:05:37 AM	Helium valve closed
3/26/2011	11:05:37 AM	H2 valve closed
3/26/2011	11:05:37 AM	BCl3 valve closed
3/26/2011	11:05:37 AM	PH3 valve closed
3/26/2011	11:05:37 AM	SiCl4 pre valve closed
3/26/2011	11:05:37 AM	SiCl4 post valve closed
3/26/2011	11:05:37 AM	Bubbler valve closed
3/26/2011	11:05:37 AM	Main Vac valve opened
3/26/2011	11:05:37 AM	Bypass valve opened
3/26/2011	11:05:37 AM	Helium MFC set to  0.000000
3/26/2011	11:05:37 AM	H2 MFC set to  0.000000
3/26/2011	11:05:37 AM	BCl3 MFC set to  0.000000
3/26/2011	11:05:37 AM	PHl3 MFC set to  0.000000
3/26/2011	11:05:37 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:05:37 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:05:37 AM	Tube furnace set to 0
3/26/2011	11:06:37 AM	H2 valve closed
3/26/2011	11:06:37 AM	BCl3 valve closed
3/26/2011	11:06:37 AM	PH3 valve closed
3/26/2011	11:06:37 AM	SiCl4 pre valve closed
3/26/2011	11:06:37 AM	SiCl4 post valve closed
3/26/2011	11:06:37 AM	Bubbler valve closed
3/26/2011	11:06:37 AM	Helium valve opened
3/26/2011	11:06:38 AM	Main Vac valve opened
3/26/2011	11:06:38 AM	Bypass valve opened
3/26/2011	11:06:38 AM	Helium MFC set to  100.000000
3/26/2011	11:06:38 AM	H2 MFC set to  0.000000
3/26/2011	11:06:38 AM	BCl3 MFC set to  0.000000
3/26/2011	11:06:38 AM	PHl3 MFC set to  0.000000
3/26/2011	11:06:38 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:06:38 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:06:38 AM	Tube furnace set to 0
3/26/2011	11:07:38 AM	Helium valve closed
3/26/2011	11:07:38 AM	H2 valve closed
3/26/2011	11:07:38 AM	BCl3 valve closed
3/26/2011	11:07:38 AM	PH3 valve closed
3/26/2011	11:07:38 AM	SiCl4 pre valve closed
3/26/2011	11:07:38 AM	SiCl4 post valve closed
3/26/2011	11:07:38 AM	Bubbler valve closed
3/26/2011	11:07:38 AM	Main Vac valve opened
3/26/2011	11:07:38 AM	Bypass valve opened
3/26/2011	11:07:38 AM	Helium MFC set to  0.000000
3/26/2011	11:07:38 AM	H2 MFC set to  0.000000
3/26/2011	11:07:38 AM	BCl3 MFC set to  0.000000
3/26/2011	11:07:38 AM	PHl3 MFC set to  0.000000
3/26/2011	11:07:38 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:07:38 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:07:38 AM	Tube furnace set to 0
3/26/2011	11:08:38 AM	H2 valve closed
3/26/2011	11:08:38 AM	BCl3 valve closed
3/26/2011	11:08:38 AM	PH3 valve closed
3/26/2011	11:08:38 AM	SiCl4 pre valve closed
3/26/2011	11:08:38 AM	SiCl4 post valve closed
3/26/2011	11:08:38 AM	Bubbler valve closed
3/26/2011	11:08:38 AM	Helium valve opened
3/26/2011	11:08:38 AM	Main Vac valve opened
3/26/2011	11:08:38 AM	Bypass valve opened
3/26/2011	11:08:38 AM	Helium MFC set to  100.000000
3/26/2011	11:08:38 AM	H2 MFC set to  0.000000
3/26/2011	11:08:38 AM	BCl3 MFC set to  0.000000
3/26/2011	11:08:38 AM	PHl3 MFC set to  0.000000
3/26/2011	11:08:38 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:08:38 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:08:38 AM	Tube furnace set to 0
3/26/2011	11:09:38 AM	Helium valve closed
3/26/2011	11:09:38 AM	H2 valve closed
3/26/2011	11:09:38 AM	BCl3 valve closed
3/26/2011	11:09:38 AM	PH3 valve closed
3/26/2011	11:09:38 AM	SiCl4 pre valve closed
3/26/2011	11:09:38 AM	SiCl4 post valve closed
3/26/2011	11:09:38 AM	Bubbler valve closed
3/26/2011	11:09:38 AM	Main Vac valve opened
3/26/2011	11:09:38 AM	Bypass valve opened
3/26/2011	11:09:38 AM	Helium MFC set to  0.000000
3/26/2011	11:09:38 AM	H2 MFC set to  0.000000
3/26/2011	11:09:38 AM	BCl3 MFC set to  0.000000
3/26/2011	11:09:38 AM	PHl3 MFC set to  0.000000
3/26/2011	11:09:38 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:09:38 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:09:38 AM	Tube furnace set to 0
3/26/2011	11:10:38 AM	H2 valve closed
3/26/2011	11:10:38 AM	BCl3 valve closed
3/26/2011	11:10:38 AM	PH3 valve closed
3/26/2011	11:10:38 AM	SiCl4 pre valve closed
3/26/2011	11:10:38 AM	SiCl4 post valve closed
3/26/2011	11:10:38 AM	Bubbler valve closed
3/26/2011	11:10:38 AM	Helium valve opened
3/26/2011	11:10:38 AM	Main Vac valve opened
3/26/2011	11:10:38 AM	Bypass valve opened
3/26/2011	11:10:38 AM	Helium MFC set to  100.000000
3/26/2011	11:10:38 AM	H2 MFC set to  0.000000
3/26/2011	11:10:38 AM	BCl3 MFC set to  0.000000
3/26/2011	11:10:38 AM	PHl3 MFC set to  0.000000
3/26/2011	11:10:38 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:10:38 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:10:38 AM	Tube furnace set to 0
3/26/2011	11:11:38 AM	Helium valve closed
3/26/2011	11:11:38 AM	H2 valve closed
3/26/2011	11:11:38 AM	BCl3 valve closed
3/26/2011	11:11:38 AM	PH3 valve closed
3/26/2011	11:11:38 AM	SiCl4 pre valve closed
3/26/2011	11:11:38 AM	SiCl4 post valve closed
3/26/2011	11:11:38 AM	Bubbler valve closed
3/26/2011	11:11:38 AM	Main Vac valve opened
3/26/2011	11:11:38 AM	Bypass valve opened
3/26/2011	11:11:38 AM	Helium MFC set to  0.000000
3/26/2011	11:11:38 AM	H2 MFC set to  0.000000
3/26/2011	11:11:38 AM	BCl3 MFC set to  0.000000
3/26/2011	11:11:38 AM	PHl3 MFC set to  0.000000
3/26/2011	11:11:38 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:11:38 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:11:39 AM	Tube furnace set to 0
3/26/2011	11:12:39 AM	H2 valve closed
3/26/2011	11:12:39 AM	BCl3 valve closed
3/26/2011	11:12:39 AM	PH3 valve closed
3/26/2011	11:12:39 AM	SiCl4 pre valve closed
3/26/2011	11:12:39 AM	SiCl4 post valve closed
3/26/2011	11:12:39 AM	Bubbler valve closed
3/26/2011	11:12:39 AM	Helium valve opened
3/26/2011	11:12:39 AM	Main Vac valve opened
3/26/2011	11:12:39 AM	Bypass valve opened
3/26/2011	11:12:39 AM	Helium MFC set to  100.000000
3/26/2011	11:12:39 AM	H2 MFC set to  0.000000
3/26/2011	11:12:39 AM	BCl3 MFC set to  0.000000
3/26/2011	11:12:39 AM	PHl3 MFC set to  0.000000
3/26/2011	11:12:39 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:12:39 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:12:39 AM	Tube furnace set to 0
3/26/2011	11:13:39 AM	Helium valve closed
3/26/2011	11:13:39 AM	H2 valve closed
3/26/2011	11:13:39 AM	BCl3 valve closed
3/26/2011	11:13:39 AM	PH3 valve closed
3/26/2011	11:13:39 AM	SiCl4 pre valve closed
3/26/2011	11:13:39 AM	SiCl4 post valve closed
3/26/2011	11:13:39 AM	Bubbler valve closed
3/26/2011	11:13:39 AM	Main Vac valve opened
3/26/2011	11:13:39 AM	Bypass valve opened
3/26/2011	11:13:39 AM	Helium MFC set to  0.000000
3/26/2011	11:13:39 AM	H2 MFC set to  0.000000
3/26/2011	11:13:39 AM	BCl3 MFC set to  0.000000
3/26/2011	11:13:39 AM	PHl3 MFC set to  0.000000
3/26/2011	11:13:39 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:13:39 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:13:39 AM	Tube furnace set to 0
3/26/2011	11:14:39 AM	H2 valve closed
3/26/2011	11:14:39 AM	BCl3 valve closed
3/26/2011	11:14:39 AM	PH3 valve closed
3/26/2011	11:14:39 AM	SiCl4 pre valve closed
3/26/2011	11:14:39 AM	SiCl4 post valve closed
3/26/2011	11:14:39 AM	Bubbler valve closed
3/26/2011	11:14:39 AM	Helium valve opened
3/26/2011	11:14:39 AM	Main Vac valve opened
3/26/2011	11:14:39 AM	Bypass valve opened
3/26/2011	11:14:39 AM	Helium MFC set to  100.000000
3/26/2011	11:14:39 AM	H2 MFC set to  0.000000
3/26/2011	11:14:39 AM	BCl3 MFC set to  0.000000
3/26/2011	11:14:39 AM	PHl3 MFC set to  0.000000
3/26/2011	11:14:39 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:14:39 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:14:39 AM	Tube furnace set to 0
3/26/2011	11:15:39 AM	Helium valve closed
3/26/2011	11:15:39 AM	H2 valve closed
3/26/2011	11:15:39 AM	BCl3 valve closed
3/26/2011	11:15:39 AM	PH3 valve closed
3/26/2011	11:15:39 AM	SiCl4 pre valve closed
3/26/2011	11:15:39 AM	SiCl4 post valve closed
3/26/2011	11:15:39 AM	Bubbler valve closed
3/26/2011	11:15:39 AM	Main Vac valve opened
3/26/2011	11:15:39 AM	Bypass valve opened
3/26/2011	11:15:39 AM	Helium MFC set to  0.000000
3/26/2011	11:15:39 AM	H2 MFC set to  0.000000
3/26/2011	11:15:39 AM	BCl3 MFC set to  0.000000
3/26/2011	11:15:39 AM	PHl3 MFC set to  0.000000
3/26/2011	11:15:39 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:15:39 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:15:39 AM	Tube furnace set to 0
3/26/2011	11:16:39 AM	H2 valve closed
3/26/2011	11:16:39 AM	BCl3 valve closed
3/26/2011	11:16:39 AM	PH3 valve closed
3/26/2011	11:16:39 AM	SiCl4 pre valve closed
3/26/2011	11:16:39 AM	SiCl4 post valve closed
3/26/2011	11:16:39 AM	Bubbler valve closed
3/26/2011	11:16:39 AM	Helium valve opened
3/26/2011	11:16:39 AM	Main Vac valve opened
3/26/2011	11:16:39 AM	Bypass valve opened
3/26/2011	11:16:39 AM	Helium MFC set to  100.000000
3/26/2011	11:16:39 AM	H2 MFC set to  0.000000
3/26/2011	11:16:39 AM	BCl3 MFC set to  0.000000
3/26/2011	11:16:39 AM	PHl3 MFC set to  0.000000
3/26/2011	11:16:39 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:16:39 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:16:40 AM	Tube furnace set to 0
3/26/2011	11:17:40 AM	Helium valve closed
3/26/2011	11:17:40 AM	H2 valve closed
3/26/2011	11:17:40 AM	BCl3 valve closed
3/26/2011	11:17:40 AM	PH3 valve closed
3/26/2011	11:17:40 AM	SiCl4 pre valve closed
3/26/2011	11:17:40 AM	SiCl4 post valve closed
3/26/2011	11:17:40 AM	Bubbler valve closed
3/26/2011	11:17:40 AM	Main Vac valve opened
3/26/2011	11:17:40 AM	Bypass valve opened
3/26/2011	11:17:40 AM	Helium MFC set to  0.000000
3/26/2011	11:17:40 AM	H2 MFC set to  0.000000
3/26/2011	11:17:40 AM	BCl3 MFC set to  0.000000
3/26/2011	11:17:40 AM	PHl3 MFC set to  0.000000
3/26/2011	11:17:40 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:17:40 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:17:40 AM	Tube furnace set to 0
3/26/2011	11:18:40 AM	H2 valve closed
3/26/2011	11:18:40 AM	BCl3 valve closed
3/26/2011	11:18:40 AM	PH3 valve closed
3/26/2011	11:18:40 AM	SiCl4 pre valve closed
3/26/2011	11:18:40 AM	SiCl4 post valve closed
3/26/2011	11:18:40 AM	Bubbler valve closed
3/26/2011	11:18:40 AM	Helium valve opened
3/26/2011	11:18:40 AM	Main Vac valve opened
3/26/2011	11:18:40 AM	Bypass valve opened
3/26/2011	11:18:40 AM	Helium MFC set to  100.000000
3/26/2011	11:18:40 AM	H2 MFC set to  0.000000
3/26/2011	11:18:40 AM	BCl3 MFC set to  0.000000
3/26/2011	11:18:40 AM	PHl3 MFC set to  0.000000
3/26/2011	11:18:40 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:18:40 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:18:40 AM	Tube furnace set to 0
3/26/2011	11:19:40 AM	Helium valve closed
3/26/2011	11:19:40 AM	H2 valve closed
3/26/2011	11:19:40 AM	BCl3 valve closed
3/26/2011	11:19:40 AM	PH3 valve closed
3/26/2011	11:19:40 AM	SiCl4 pre valve closed
3/26/2011	11:19:40 AM	SiCl4 post valve closed
3/26/2011	11:19:40 AM	Bubbler valve closed
3/26/2011	11:19:40 AM	Main Vac valve opened
3/26/2011	11:19:40 AM	Bypass valve opened
3/26/2011	11:19:40 AM	Helium MFC set to  0.000000
3/26/2011	11:19:40 AM	H2 MFC set to  0.000000
3/26/2011	11:19:40 AM	BCl3 MFC set to  0.000000
3/26/2011	11:19:40 AM	PHl3 MFC set to  0.000000
3/26/2011	11:19:40 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:19:40 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:19:40 AM	Tube furnace set to 0
3/26/2011	11:20:40 AM	H2 valve closed
3/26/2011	11:20:40 AM	BCl3 valve closed
3/26/2011	11:20:40 AM	PH3 valve closed
3/26/2011	11:20:40 AM	SiCl4 pre valve closed
3/26/2011	11:20:40 AM	SiCl4 post valve closed
3/26/2011	11:20:40 AM	Bubbler valve closed
3/26/2011	11:20:40 AM	Helium valve opened
3/26/2011	11:20:40 AM	Main Vac valve opened
3/26/2011	11:20:40 AM	Bypass valve opened
3/26/2011	11:20:40 AM	Helium MFC set to  100.000000
3/26/2011	11:20:40 AM	H2 MFC set to  0.000000
3/26/2011	11:20:40 AM	BCl3 MFC set to  0.000000
3/26/2011	11:20:40 AM	PHl3 MFC set to  0.000000
3/26/2011	11:20:40 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:20:40 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:20:40 AM	Tube furnace set to 0
3/26/2011	11:21:40 AM	Helium valve closed
3/26/2011	11:21:40 AM	H2 valve closed
3/26/2011	11:21:40 AM	BCl3 valve closed
3/26/2011	11:21:40 AM	PH3 valve closed
3/26/2011	11:21:40 AM	SiCl4 pre valve closed
3/26/2011	11:21:40 AM	SiCl4 post valve closed
3/26/2011	11:21:40 AM	Bubbler valve closed
3/26/2011	11:21:40 AM	Main Vac valve opened
3/26/2011	11:21:40 AM	Bypass valve opened
3/26/2011	11:21:40 AM	Helium MFC set to  0.000000
3/26/2011	11:21:40 AM	H2 MFC set to  0.000000
3/26/2011	11:21:40 AM	BCl3 MFC set to  0.000000
3/26/2011	11:21:40 AM	PHl3 MFC set to  0.000000
3/26/2011	11:21:40 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:21:40 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:21:41 AM	Tube furnace set to 0
3/26/2011	11:22:41 AM	H2 valve closed
3/26/2011	11:22:41 AM	BCl3 valve closed
3/26/2011	11:22:41 AM	PH3 valve closed
3/26/2011	11:22:41 AM	SiCl4 pre valve closed
3/26/2011	11:22:41 AM	SiCl4 post valve closed
3/26/2011	11:22:41 AM	Bubbler valve closed
3/26/2011	11:22:41 AM	Helium valve opened
3/26/2011	11:22:41 AM	Main Vac valve opened
3/26/2011	11:22:41 AM	Bypass valve opened
3/26/2011	11:22:41 AM	Helium MFC set to  100.000000
3/26/2011	11:22:41 AM	H2 MFC set to  0.000000
3/26/2011	11:22:41 AM	BCl3 MFC set to  0.000000
3/26/2011	11:22:41 AM	PHl3 MFC set to  0.000000
3/26/2011	11:22:41 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:22:41 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:22:41 AM	Tube furnace set to 0
3/26/2011	11:23:41 AM	Helium valve closed
3/26/2011	11:23:41 AM	H2 valve closed
3/26/2011	11:23:41 AM	BCl3 valve closed
3/26/2011	11:23:41 AM	PH3 valve closed
3/26/2011	11:23:41 AM	SiCl4 pre valve closed
3/26/2011	11:23:41 AM	SiCl4 post valve closed
3/26/2011	11:23:41 AM	Bubbler valve closed
3/26/2011	11:23:41 AM	Main Vac valve opened
3/26/2011	11:23:41 AM	Bypass valve opened
3/26/2011	11:23:41 AM	Helium MFC set to  0.000000
3/26/2011	11:23:41 AM	H2 MFC set to  0.000000
3/26/2011	11:23:41 AM	BCl3 MFC set to  0.000000
3/26/2011	11:23:41 AM	PHl3 MFC set to  0.000000
3/26/2011	11:23:41 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:23:41 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:23:41 AM	Tube furnace set to 0
3/26/2011	11:24:41 AM	H2 valve closed
3/26/2011	11:24:41 AM	BCl3 valve closed
3/26/2011	11:24:41 AM	PH3 valve closed
3/26/2011	11:24:41 AM	SiCl4 pre valve closed
3/26/2011	11:24:41 AM	SiCl4 post valve closed
3/26/2011	11:24:41 AM	Bubbler valve closed
3/26/2011	11:24:41 AM	Helium valve opened
3/26/2011	11:24:41 AM	Main Vac valve opened
3/26/2011	11:24:41 AM	Bypass valve opened
3/26/2011	11:24:41 AM	Helium MFC set to  100.000000
3/26/2011	11:24:41 AM	H2 MFC set to  0.000000
3/26/2011	11:24:41 AM	BCl3 MFC set to  0.000000
3/26/2011	11:24:41 AM	PHl3 MFC set to  0.000000
3/26/2011	11:24:41 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:24:41 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:24:41 AM	Tube furnace set to 0
3/26/2011	11:25:41 AM	Helium valve closed
3/26/2011	11:25:41 AM	H2 valve closed
3/26/2011	11:25:41 AM	BCl3 valve closed
3/26/2011	11:25:41 AM	PH3 valve closed
3/26/2011	11:25:41 AM	SiCl4 pre valve closed
3/26/2011	11:25:41 AM	SiCl4 post valve closed
3/26/2011	11:25:41 AM	Bubbler valve closed
3/26/2011	11:25:41 AM	Main Vac valve opened
3/26/2011	11:25:41 AM	Bypass valve opened
3/26/2011	11:25:41 AM	Helium MFC set to  0.000000
3/26/2011	11:25:41 AM	H2 MFC set to  0.000000
3/26/2011	11:25:41 AM	BCl3 MFC set to  0.000000
3/26/2011	11:25:41 AM	PHl3 MFC set to  0.000000
3/26/2011	11:25:41 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:25:41 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:25:41 AM	Tube furnace set to 0
3/26/2011	11:25:42 AM	Run finished at 11:25 AM
3/26/2011	11:25:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/26/2011	11:39:55 AM	Helium MFC set to  100.000000
3/26/2011	11:39:57 AM	Helium valve opened
3/26/2011	11:40:06 AM	Helium valve closed
3/26/2011	11:40:09 AM	Helium MFC set to  0.000000
3/26/2011	11:42:20 AM	Helium valve opened
3/26/2011	11:42:26 AM	Helium valve closed
3/26/2011	11:42:52 AM	Helium valve opened
3/26/2011	11:42:56 AM	Helium MFC set to  50.000000
3/26/2011	11:43:07 AM	Helium MFC set to  100.000000
3/26/2011	11:43:41 AM	Helium MFC set to  0.000000
3/26/2011	11:43:43 AM	Helium valve closed
3/26/2011	11:44:44 AM	Recipe started at 11:44 AM
3/26/2011	11:44:44 AM	Helium valve closed
3/26/2011	11:44:44 AM	BCl3 valve closed
3/26/2011	11:44:44 AM	PH3 valve closed
3/26/2011	11:44:44 AM	SiCl4 pre valve closed
3/26/2011	11:44:44 AM	SiCl4 post valve closed
3/26/2011	11:44:44 AM	Main Vac valve closed
3/26/2011	11:44:44 AM	Bypass valve closed
3/26/2011	11:44:44 AM	Bubbler valve closed
3/26/2011	11:44:44 AM	H2 valve opened
3/26/2011	11:44:44 AM	Helium MFC set to  0.000000
3/26/2011	11:44:44 AM	H2 MFC set to  500.000000
3/26/2011	11:44:44 AM	BCl3 MFC set to  0.000000
3/26/2011	11:44:44 AM	PHl3 MFC set to  0.000000
3/26/2011	11:44:44 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:44:44 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:44:44 AM	Tube furnace set to 0
3/26/2011	11:46:05 AM	Helium valve closed
3/26/2011	11:46:05 AM	BCl3 valve closed
3/26/2011	11:46:05 AM	PH3 valve closed
3/26/2011	11:46:05 AM	SiCl4 pre valve closed
3/26/2011	11:46:05 AM	SiCl4 post valve closed
3/26/2011	11:46:05 AM	Main Vac valve closed
3/26/2011	11:46:05 AM	Bypass valve closed
3/26/2011	11:46:05 AM	H2 valve opened
3/26/2011	11:46:05 AM	Bubbler valve opened
3/26/2011	11:46:05 AM	Helium MFC set to  0.000000
3/26/2011	11:46:05 AM	H2 MFC set to  500.000000
3/26/2011	11:46:05 AM	BCl3 MFC set to  0.000000
3/26/2011	11:46:05 AM	PHl3 MFC set to  0.000000
3/26/2011	11:46:05 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:46:05 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:46:05 AM	Tube furnace set to 1050
3/26/2011	11:46:11 AM	Helium valve closed
3/26/2011	11:46:11 AM	H2 valve closed
3/26/2011	11:46:11 AM	BCl3 valve closed
3/26/2011	11:46:11 AM	PH3 valve closed
3/26/2011	11:46:11 AM	SiCl4 pre valve closed
3/26/2011	11:46:11 AM	SiCl4 post valve closed
3/26/2011	11:46:11 AM	Main Vac valve closed
3/26/2011	11:46:11 AM	Bubbler valve closed
3/26/2011	11:46:11 AM	Bypass valve closed
3/26/2011	11:46:11 AM	Helium MFC set to  0.000000
3/26/2011	11:46:11 AM	H2 MFC set to  0.000000
3/26/2011	11:46:11 AM	BCl3 MFC set to  0.000000
3/26/2011	11:46:11 AM	PHl3 MFC set to  0.000000
3/26/2011	11:46:11 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:46:11 AM	Bypass solenoid MFC set to  760.000000
3/26/2011	11:46:11 AM	Tube furnace set to 0
3/26/2011	11:46:11 AM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
3/26/2011	11:46:28 AM	Run aborted at 11:46 AM
3/26/2011	11:47:18 AM	Recipe started at 11:47 AM
3/26/2011	11:47:18 AM	Helium valve closed
3/26/2011	11:47:18 AM	BCl3 valve closed
3/26/2011	11:47:18 AM	PH3 valve closed
3/26/2011	11:47:18 AM	SiCl4 pre valve closed
3/26/2011	11:47:18 AM	SiCl4 post valve closed
3/26/2011	11:47:18 AM	Main Vac valve closed
3/26/2011	11:47:18 AM	Bypass valve closed
3/26/2011	11:47:18 AM	Bubbler valve closed
3/26/2011	11:47:18 AM	H2 valve opened
3/26/2011	11:47:18 AM	Helium MFC set to  0.000000
3/26/2011	11:47:18 AM	H2 MFC set to  500.000000
3/26/2011	11:47:18 AM	BCl3 MFC set to  0.000000
3/26/2011	11:47:18 AM	PHl3 MFC set to  0.000000
3/26/2011	11:47:18 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:47:18 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:47:18 AM	Tube furnace set to 0
3/26/2011	11:47:20 AM	Helium valve closed
3/26/2011	11:47:20 AM	BCl3 valve closed
3/26/2011	11:47:20 AM	PH3 valve closed
3/26/2011	11:47:20 AM	SiCl4 pre valve closed
3/26/2011	11:47:20 AM	SiCl4 post valve closed
3/26/2011	11:47:20 AM	Main Vac valve closed
3/26/2011	11:47:20 AM	Bypass valve closed
3/26/2011	11:47:20 AM	H2 valve opened
3/26/2011	11:47:20 AM	Bubbler valve opened
3/26/2011	11:47:20 AM	Helium MFC set to  0.000000
3/26/2011	11:47:20 AM	H2 MFC set to  500.000000
3/26/2011	11:47:20 AM	BCl3 MFC set to  0.000000
3/26/2011	11:47:20 AM	PHl3 MFC set to  0.000000
3/26/2011	11:47:20 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:47:20 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:47:20 AM	Tube furnace set to 1050
3/26/2011	11:47:23 AM	Helium valve closed
3/26/2011	11:47:23 AM	H2 valve closed
3/26/2011	11:47:23 AM	BCl3 valve closed
3/26/2011	11:47:23 AM	PH3 valve closed
3/26/2011	11:47:23 AM	SiCl4 pre valve closed
3/26/2011	11:47:23 AM	SiCl4 post valve closed
3/26/2011	11:47:23 AM	Main Vac valve closed
3/26/2011	11:47:23 AM	Bubbler valve closed
3/26/2011	11:47:23 AM	Bypass valve closed
3/26/2011	11:47:23 AM	Helium MFC set to  0.000000
3/26/2011	11:47:23 AM	H2 MFC set to  0.000000
3/26/2011	11:47:23 AM	BCl3 MFC set to  0.000000
3/26/2011	11:47:23 AM	PHl3 MFC set to  0.000000
3/26/2011	11:47:23 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:47:23 AM	Bypass solenoid MFC set to  760.000000
3/26/2011	11:47:23 AM	Tube furnace set to 0
3/26/2011	11:47:23 AM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
3/26/2011	11:47:28 AM	Run aborted at 11:47 AM
3/26/2011	11:50:15 AM	Program started after a nonstandard shutdown
3/26/2011	11:50:19 AM	Helium valve closed
3/26/2011	11:50:19 AM	H2 valve closed
3/26/2011	11:50:19 AM	BCl3 valve closed
3/26/2011	11:50:19 AM	PH3 valve closed
3/26/2011	11:50:19 AM	SiCl4 pre valve closed
3/26/2011	11:50:19 AM	SiCl4 post valve closed
3/26/2011	11:50:19 AM	Main Vac valve closed
3/26/2011	11:50:19 AM	Bypass valve closed
3/26/2011	11:50:19 AM	Bubbler valve closed
3/26/2011	11:50:19 AM	Helium MFC set to  0.000000
3/26/2011	11:50:19 AM	H2 MFC set to  0.000000
3/26/2011	11:50:19 AM	BCl3 MFC set to  0.000000
3/26/2011	11:50:19 AM	PHl3 MFC set to  0.000000
3/26/2011	11:50:19 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:50:19 AM	Bypass solenoid MFC set to  760.000000
3/26/2011	11:50:19 AM	Tube furnace set to 0
3/26/2011	11:50:55 AM	Bypass valve opened
3/26/2011	11:50:57 AM	Bypass valve closed
3/26/2011	11:51:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/26/2011	11:51:04 AM	Recipe started at 11:51 AM
3/26/2011	11:51:04 AM	H2 valve closed
3/26/2011	11:51:04 AM	BCl3 valve closed
3/26/2011	11:51:04 AM	PH3 valve closed
3/26/2011	11:51:04 AM	SiCl4 pre valve closed
3/26/2011	11:51:04 AM	SiCl4 post valve closed
3/26/2011	11:51:04 AM	Main Vac valve closed
3/26/2011	11:51:04 AM	Bypass valve closed
3/26/2011	11:51:04 AM	Bubbler valve closed
3/26/2011	11:51:04 AM	Helium valve opened
3/26/2011	11:51:04 AM	Helium MFC set to  500.000000
3/26/2011	11:51:04 AM	H2 MFC set to  0.000000
3/26/2011	11:51:04 AM	BCl3 MFC set to  0.000000
3/26/2011	11:51:04 AM	PHl3 MFC set to  0.000000
3/26/2011	11:51:04 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:51:04 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:51:05 AM	Tube furnace set to 0
3/26/2011	11:51:43 AM	Helium valve closed
3/26/2011	11:51:43 AM	H2 valve closed
3/26/2011	11:51:43 AM	BCl3 valve closed
3/26/2011	11:51:43 AM	PH3 valve closed
3/26/2011	11:51:43 AM	SiCl4 pre valve closed
3/26/2011	11:51:43 AM	SiCl4 post valve closed
3/26/2011	11:51:43 AM	Main Vac valve closed
3/26/2011	11:51:43 AM	Bypass valve closed
3/26/2011	11:51:43 AM	Bubbler valve closed
3/26/2011	11:51:43 AM	Helium MFC set to  0.000000
3/26/2011	11:51:43 AM	H2 MFC set to  0.000000
3/26/2011	11:51:43 AM	BCl3 MFC set to  0.000000
3/26/2011	11:51:43 AM	PHl3 MFC set to  0.000000
3/26/2011	11:51:43 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:51:43 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:51:43 AM	Tube furnace set to 0
3/26/2011	11:51:43 AM	Run finished at 11:51 AM
3/26/2011	11:51:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/26/2011	11:52:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	11:52:01 AM	Recipe started at 11:52 AM
3/26/2011	11:52:01 AM	Helium valve closed
3/26/2011	11:52:01 AM	H2 valve closed
3/26/2011	11:52:01 AM	BCl3 valve closed
3/26/2011	11:52:01 AM	PH3 valve closed
3/26/2011	11:52:01 AM	SiCl4 pre valve closed
3/26/2011	11:52:01 AM	SiCl4 post valve closed
3/26/2011	11:52:01 AM	Main Vac valve closed
3/26/2011	11:52:01 AM	Bubbler valve closed
3/26/2011	11:52:01 AM	Bypass valve opened
3/26/2011	11:52:01 AM	Helium MFC set to  0.000000
3/26/2011	11:52:01 AM	H2 MFC set to  0.000000
3/26/2011	11:52:01 AM	BCl3 MFC set to  0.000000
3/26/2011	11:52:01 AM	PHl3 MFC set to  0.000000
3/26/2011	11:52:01 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:52:01 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:52:01 AM	Tube furnace set to 0
3/26/2011	11:52:20 AM	Helium valve closed
3/26/2011	11:52:20 AM	H2 valve closed
3/26/2011	11:52:20 AM	BCl3 valve closed
3/26/2011	11:52:20 AM	PH3 valve closed
3/26/2011	11:52:20 AM	SiCl4 pre valve closed
3/26/2011	11:52:20 AM	SiCl4 post valve closed
3/26/2011	11:52:20 AM	Bubbler valve closed
3/26/2011	11:52:20 AM	Main Vac valve opened
3/26/2011	11:52:20 AM	Bypass valve opened
3/26/2011	11:52:20 AM	Helium MFC set to  0.000000
3/26/2011	11:52:20 AM	H2 MFC set to  0.000000
3/26/2011	11:52:20 AM	BCl3 MFC set to  0.000000
3/26/2011	11:52:20 AM	PHl3 MFC set to  0.000000
3/26/2011	11:52:20 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:52:20 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:52:20 AM	Tube furnace set to 0
3/26/2011	11:52:21 AM	Run finished at 11:52 AM
3/26/2011	11:52:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	11:54:09 AM	Recipe started at 11:54 AM
3/26/2011	11:54:09 AM	Helium valve closed
3/26/2011	11:54:09 AM	BCl3 valve closed
3/26/2011	11:54:09 AM	PH3 valve closed
3/26/2011	11:54:09 AM	SiCl4 pre valve closed
3/26/2011	11:54:09 AM	SiCl4 post valve closed
3/26/2011	11:54:09 AM	Main Vac valve closed
3/26/2011	11:54:09 AM	Bypass valve closed
3/26/2011	11:54:09 AM	Bubbler valve closed
3/26/2011	11:54:09 AM	H2 valve opened
3/26/2011	11:54:09 AM	Helium MFC set to  0.000000
3/26/2011	11:54:09 AM	H2 MFC set to  500.000000
3/26/2011	11:54:09 AM	BCl3 MFC set to  0.000000
3/26/2011	11:54:09 AM	PHl3 MFC set to  0.000000
3/26/2011	11:54:09 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:54:09 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:54:09 AM	Tube furnace set to 0
3/26/2011	11:55:29 AM	Helium valve closed
3/26/2011	11:55:29 AM	BCl3 valve closed
3/26/2011	11:55:29 AM	PH3 valve closed
3/26/2011	11:55:30 AM	SiCl4 pre valve closed
3/26/2011	11:55:30 AM	SiCl4 post valve closed
3/26/2011	11:55:30 AM	Main Vac valve closed
3/26/2011	11:55:30 AM	Bypass valve closed
3/26/2011	11:55:30 AM	H2 valve opened
3/26/2011	11:55:30 AM	Bubbler valve opened
3/26/2011	11:55:30 AM	Helium MFC set to  0.000000
3/26/2011	11:55:30 AM	H2 MFC set to  500.000000
3/26/2011	11:55:30 AM	BCl3 MFC set to  0.000000
3/26/2011	11:55:30 AM	PHl3 MFC set to  0.000000
3/26/2011	11:55:30 AM	SiCl4 MFC set to  0.000000
3/26/2011	11:55:30 AM	Bypass solenoid MFC set to  0.000000
3/26/2011	11:55:30 AM	Tube furnace set to 1050
3/26/2011	12:15:30 PM	Helium valve closed
3/26/2011	12:15:30 PM	PH3 valve closed
3/26/2011	12:15:30 PM	Main Vac valve closed
3/26/2011	12:15:30 PM	Bypass valve closed
3/26/2011	12:15:30 PM	H2 valve opened
3/26/2011	12:15:30 PM	BCl3 valve opened
3/26/2011	12:15:30 PM	SiCl4 pre valve opened
3/26/2011	12:15:30 PM	SiCl4 post valve opened
3/26/2011	12:15:30 PM	Bubbler valve opened
3/26/2011	12:15:30 PM	Helium MFC set to  0.000000
3/26/2011	12:15:30 PM	H2 MFC set to  500.000000
3/26/2011	12:15:30 PM	BCl3 MFC set to  3.000000
3/26/2011	12:15:30 PM	PHl3 MFC set to  0.000000
3/26/2011	12:15:30 PM	SiCl4 MFC set to  50.000000
3/26/2011	12:15:30 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	12:15:30 PM	Tube furnace set to 1050
3/26/2011	12:35:30 PM	H2 valve closed
3/26/2011	12:35:30 PM	BCl3 valve closed
3/26/2011	12:35:30 PM	PH3 valve closed
3/26/2011	12:35:30 PM	SiCl4 pre valve closed
3/26/2011	12:35:30 PM	SiCl4 post valve closed
3/26/2011	12:35:30 PM	Main Vac valve closed
3/26/2011	12:35:30 PM	Bypass valve closed
3/26/2011	12:35:30 PM	Helium valve opened
3/26/2011	12:35:30 PM	Bubbler valve opened
3/26/2011	12:35:30 PM	Helium MFC set to  500.000000
3/26/2011	12:35:30 PM	H2 MFC set to  0.000000
3/26/2011	12:35:30 PM	BCl3 MFC set to  0.000000
3/26/2011	12:35:30 PM	PHl3 MFC set to  0.000000
3/26/2011	12:35:30 PM	SiCl4 MFC set to  0.000000
3/26/2011	12:35:30 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	12:35:30 PM	Tube furnace set to 0
3/26/2011	12:55:30 PM	Helium valve closed
3/26/2011	12:55:30 PM	H2 valve closed
3/26/2011	12:55:30 PM	BCl3 valve closed
3/26/2011	12:55:30 PM	PH3 valve closed
3/26/2011	12:55:30 PM	SiCl4 pre valve closed
3/26/2011	12:55:30 PM	SiCl4 post valve closed
3/26/2011	12:55:30 PM	Main Vac valve closed
3/26/2011	12:55:30 PM	Bypass valve closed
3/26/2011	12:55:30 PM	Bubbler valve closed
3/26/2011	12:55:30 PM	Helium MFC set to  0.000000
3/26/2011	12:55:30 PM	H2 MFC set to  0.000000
3/26/2011	12:55:30 PM	BCl3 MFC set to  0.000000
3/26/2011	12:55:30 PM	PHl3 MFC set to  0.000000
3/26/2011	12:55:30 PM	SiCl4 MFC set to  0.000000
3/26/2011	12:55:30 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	12:55:30 PM	Tube furnace set to 0
3/26/2011	12:55:30 PM	Run finished at 12:55 PM
3/26/2011	2:48:29 PM	Program started after a nonstandard shutdown
3/26/2011	2:48:29 PM	Helium valve closed
3/26/2011	2:48:29 PM	H2 valve closed
3/26/2011	2:48:29 PM	BCl3 valve closed
3/26/2011	2:48:29 PM	PH3 valve closed
3/26/2011	2:48:29 PM	SiCl4 pre valve closed
3/26/2011	2:48:29 PM	SiCl4 post valve closed
3/26/2011	2:48:29 PM	Main Vac valve closed
3/26/2011	2:48:29 PM	Bypass valve closed
3/26/2011	2:48:29 PM	Bubbler valve closed
3/26/2011	2:48:29 PM	Helium MFC set to  0.000000
3/26/2011	2:48:29 PM	H2 MFC set to  0.000000
3/26/2011	2:48:29 PM	BCl3 MFC set to  0.000000
3/26/2011	2:48:29 PM	PHl3 MFC set to  0.000000
3/26/2011	2:48:29 PM	SiCl4 MFC set to  0.000000
3/26/2011	2:48:29 PM	Bypass solenoid MFC set to  760.000000
3/26/2011	2:48:30 PM	Tube furnace set to 0
3/26/2011	2:56:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/26/2011	2:56:25 PM	Recipe started at 2:56 PM
3/26/2011	2:56:25 PM	H2 valve closed
3/26/2011	2:56:25 PM	BCl3 valve closed
3/26/2011	2:56:25 PM	PH3 valve closed
3/26/2011	2:56:25 PM	SiCl4 pre valve closed
3/26/2011	2:56:25 PM	SiCl4 post valve closed
3/26/2011	2:56:25 PM	Main Vac valve closed
3/26/2011	2:56:25 PM	Bypass valve closed
3/26/2011	2:56:25 PM	Bubbler valve closed
3/26/2011	2:56:25 PM	Helium valve opened
3/26/2011	2:56:25 PM	Helium MFC set to  500.000000
3/26/2011	2:56:25 PM	H2 MFC set to  0.000000
3/26/2011	2:56:25 PM	BCl3 MFC set to  0.000000
3/26/2011	2:56:25 PM	PHl3 MFC set to  0.000000
3/26/2011	2:56:25 PM	SiCl4 MFC set to  0.000000
3/26/2011	2:56:25 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	2:56:25 PM	Tube furnace set to 0
3/26/2011	2:56:31 PM	Helium valve closed
3/26/2011	2:56:31 PM	H2 valve closed
3/26/2011	2:56:31 PM	BCl3 valve closed
3/26/2011	2:56:31 PM	PH3 valve closed
3/26/2011	2:56:31 PM	SiCl4 pre valve closed
3/26/2011	2:56:31 PM	SiCl4 post valve closed
3/26/2011	2:56:31 PM	Main Vac valve closed
3/26/2011	2:56:31 PM	Bypass valve closed
3/26/2011	2:56:31 PM	Bubbler valve closed
3/26/2011	2:56:31 PM	Helium MFC set to  0.000000
3/26/2011	2:56:31 PM	H2 MFC set to  0.000000
3/26/2011	2:56:31 PM	BCl3 MFC set to  0.000000
3/26/2011	2:56:31 PM	PHl3 MFC set to  0.000000
3/26/2011	2:56:31 PM	SiCl4 MFC set to  0.000000
3/26/2011	2:56:31 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	2:56:31 PM	Tube furnace set to 0
3/26/2011	2:56:32 PM	Run finished at 2:56 PM
3/26/2011	2:56:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/26/2011	3:00:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	3:00:28 PM	Recipe started at 3:00 PM
3/26/2011	3:00:28 PM	Helium valve closed
3/26/2011	3:00:28 PM	H2 valve closed
3/26/2011	3:00:28 PM	BCl3 valve closed
3/26/2011	3:00:28 PM	PH3 valve closed
3/26/2011	3:00:28 PM	SiCl4 pre valve closed
3/26/2011	3:00:28 PM	SiCl4 post valve closed
3/26/2011	3:00:28 PM	Main Vac valve closed
3/26/2011	3:00:28 PM	Bubbler valve closed
3/26/2011	3:00:28 PM	Bypass valve opened
3/26/2011	3:00:28 PM	Helium MFC set to  0.000000
3/26/2011	3:00:28 PM	H2 MFC set to  0.000000
3/26/2011	3:00:28 PM	BCl3 MFC set to  0.000000
3/26/2011	3:00:28 PM	PHl3 MFC set to  0.000000
3/26/2011	3:00:28 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:00:28 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:00:28 PM	Tube furnace set to 0
3/26/2011	3:01:00 PM	Helium valve closed
3/26/2011	3:01:00 PM	H2 valve closed
3/26/2011	3:01:00 PM	BCl3 valve closed
3/26/2011	3:01:00 PM	PH3 valve closed
3/26/2011	3:01:00 PM	SiCl4 pre valve closed
3/26/2011	3:01:00 PM	SiCl4 post valve closed
3/26/2011	3:01:00 PM	Bubbler valve closed
3/26/2011	3:01:00 PM	Main Vac valve opened
3/26/2011	3:01:00 PM	Bypass valve opened
3/26/2011	3:01:00 PM	Helium MFC set to  0.000000
3/26/2011	3:01:00 PM	H2 MFC set to  0.000000
3/26/2011	3:01:00 PM	BCl3 MFC set to  0.000000
3/26/2011	3:01:00 PM	PHl3 MFC set to  0.000000
3/26/2011	3:01:00 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:01:00 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:01:00 PM	Tube furnace set to 0
3/26/2011	3:01:01 PM	Run finished at 3:01 PM
3/26/2011	3:01:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	3:04:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/26/2011	3:05:10 PM	Recipe started at 3:05 PM
3/26/2011	3:05:10 PM	Helium valve closed
3/26/2011	3:05:10 PM	H2 valve closed
3/26/2011	3:05:10 PM	BCl3 valve closed
3/26/2011	3:05:10 PM	PH3 valve closed
3/26/2011	3:05:10 PM	SiCl4 pre valve closed
3/26/2011	3:05:10 PM	SiCl4 post valve closed
3/26/2011	3:05:10 PM	Main Vac valve closed
3/26/2011	3:05:10 PM	Bubbler valve closed
3/26/2011	3:05:10 PM	Bypass valve opened
3/26/2011	3:05:10 PM	Helium MFC set to  0.000000
3/26/2011	3:05:10 PM	H2 MFC set to  0.000000
3/26/2011	3:05:10 PM	BCl3 MFC set to  0.000000
3/26/2011	3:05:10 PM	PHl3 MFC set to  0.000000
3/26/2011	3:05:10 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:05:10 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:05:10 PM	Tube furnace set to 0
3/26/2011	3:05:10 PM	Helium valve closed
3/26/2011	3:05:10 PM	H2 valve closed
3/26/2011	3:05:10 PM	BCl3 valve closed
3/26/2011	3:05:10 PM	PH3 valve closed
3/26/2011	3:05:10 PM	SiCl4 pre valve closed
3/26/2011	3:05:10 PM	SiCl4 post valve closed
3/26/2011	3:05:10 PM	Bubbler valve closed
3/26/2011	3:05:10 PM	Main Vac valve opened
3/26/2011	3:05:10 PM	Bypass valve opened
3/26/2011	3:05:10 PM	Helium MFC set to  0.000000
3/26/2011	3:05:10 PM	H2 MFC set to  0.000000
3/26/2011	3:05:10 PM	BCl3 MFC set to  0.000000
3/26/2011	3:05:10 PM	PHl3 MFC set to  0.000000
3/26/2011	3:05:10 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:05:10 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:05:10 PM	Tube furnace set to 0
3/26/2011	3:06:10 PM	H2 valve closed
3/26/2011	3:06:10 PM	BCl3 valve closed
3/26/2011	3:06:10 PM	PH3 valve closed
3/26/2011	3:06:10 PM	SiCl4 pre valve closed
3/26/2011	3:06:10 PM	SiCl4 post valve closed
3/26/2011	3:06:10 PM	Bubbler valve closed
3/26/2011	3:06:10 PM	Helium valve opened
3/26/2011	3:06:10 PM	Main Vac valve opened
3/26/2011	3:06:10 PM	Bypass valve opened
3/26/2011	3:06:10 PM	Helium MFC set to  100.000000
3/26/2011	3:06:10 PM	H2 MFC set to  0.000000
3/26/2011	3:06:10 PM	BCl3 MFC set to  0.000000
3/26/2011	3:06:10 PM	PHl3 MFC set to  0.000000
3/26/2011	3:06:10 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:06:10 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:06:11 PM	Tube furnace set to 0
3/26/2011	3:07:11 PM	Helium valve closed
3/26/2011	3:07:11 PM	H2 valve closed
3/26/2011	3:07:11 PM	BCl3 valve closed
3/26/2011	3:07:11 PM	PH3 valve closed
3/26/2011	3:07:11 PM	SiCl4 pre valve closed
3/26/2011	3:07:11 PM	SiCl4 post valve closed
3/26/2011	3:07:11 PM	Bubbler valve closed
3/26/2011	3:07:11 PM	Main Vac valve opened
3/26/2011	3:07:11 PM	Bypass valve opened
3/26/2011	3:07:11 PM	Helium MFC set to  0.000000
3/26/2011	3:07:11 PM	H2 MFC set to  0.000000
3/26/2011	3:07:11 PM	BCl3 MFC set to  0.000000
3/26/2011	3:07:11 PM	PHl3 MFC set to  0.000000
3/26/2011	3:07:11 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:07:11 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:07:11 PM	Tube furnace set to 0
3/26/2011	3:08:11 PM	H2 valve closed
3/26/2011	3:08:11 PM	BCl3 valve closed
3/26/2011	3:08:11 PM	PH3 valve closed
3/26/2011	3:08:11 PM	SiCl4 pre valve closed
3/26/2011	3:08:11 PM	SiCl4 post valve closed
3/26/2011	3:08:11 PM	Bubbler valve closed
3/26/2011	3:08:11 PM	Helium valve opened
3/26/2011	3:08:11 PM	Main Vac valve opened
3/26/2011	3:08:11 PM	Bypass valve opened
3/26/2011	3:08:11 PM	Helium MFC set to  100.000000
3/26/2011	3:08:11 PM	H2 MFC set to  0.000000
3/26/2011	3:08:11 PM	BCl3 MFC set to  0.000000
3/26/2011	3:08:11 PM	PHl3 MFC set to  0.000000
3/26/2011	3:08:11 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:08:11 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:08:11 PM	Tube furnace set to 0
3/26/2011	3:09:11 PM	Helium valve closed
3/26/2011	3:09:11 PM	H2 valve closed
3/26/2011	3:09:11 PM	BCl3 valve closed
3/26/2011	3:09:11 PM	PH3 valve closed
3/26/2011	3:09:11 PM	SiCl4 pre valve closed
3/26/2011	3:09:11 PM	SiCl4 post valve closed
3/26/2011	3:09:11 PM	Bubbler valve closed
3/26/2011	3:09:11 PM	Main Vac valve opened
3/26/2011	3:09:11 PM	Bypass valve opened
3/26/2011	3:09:11 PM	Helium MFC set to  0.000000
3/26/2011	3:09:11 PM	H2 MFC set to  0.000000
3/26/2011	3:09:11 PM	BCl3 MFC set to  0.000000
3/26/2011	3:09:11 PM	PHl3 MFC set to  0.000000
3/26/2011	3:09:11 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:09:11 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:09:11 PM	Tube furnace set to 0
3/26/2011	3:10:11 PM	H2 valve closed
3/26/2011	3:10:11 PM	BCl3 valve closed
3/26/2011	3:10:11 PM	PH3 valve closed
3/26/2011	3:10:11 PM	SiCl4 pre valve closed
3/26/2011	3:10:11 PM	SiCl4 post valve closed
3/26/2011	3:10:11 PM	Bubbler valve closed
3/26/2011	3:10:11 PM	Helium valve opened
3/26/2011	3:10:11 PM	Main Vac valve opened
3/26/2011	3:10:11 PM	Bypass valve opened
3/26/2011	3:10:11 PM	Helium MFC set to  100.000000
3/26/2011	3:10:11 PM	H2 MFC set to  0.000000
3/26/2011	3:10:11 PM	BCl3 MFC set to  0.000000
3/26/2011	3:10:11 PM	PHl3 MFC set to  0.000000
3/26/2011	3:10:11 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:10:11 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:10:11 PM	Tube furnace set to 0
3/26/2011	3:11:11 PM	Helium valve closed
3/26/2011	3:11:11 PM	H2 valve closed
3/26/2011	3:11:11 PM	BCl3 valve closed
3/26/2011	3:11:11 PM	PH3 valve closed
3/26/2011	3:11:11 PM	SiCl4 pre valve closed
3/26/2011	3:11:11 PM	SiCl4 post valve closed
3/26/2011	3:11:11 PM	Bubbler valve closed
3/26/2011	3:11:11 PM	Main Vac valve opened
3/26/2011	3:11:11 PM	Bypass valve opened
3/26/2011	3:11:11 PM	Helium MFC set to  0.000000
3/26/2011	3:11:11 PM	H2 MFC set to  0.000000
3/26/2011	3:11:11 PM	BCl3 MFC set to  0.000000
3/26/2011	3:11:11 PM	PHl3 MFC set to  0.000000
3/26/2011	3:11:11 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:11:11 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:11:12 PM	Tube furnace set to 0
3/26/2011	3:12:12 PM	H2 valve closed
3/26/2011	3:12:12 PM	BCl3 valve closed
3/26/2011	3:12:12 PM	PH3 valve closed
3/26/2011	3:12:12 PM	SiCl4 pre valve closed
3/26/2011	3:12:12 PM	SiCl4 post valve closed
3/26/2011	3:12:12 PM	Bubbler valve closed
3/26/2011	3:12:12 PM	Helium valve opened
3/26/2011	3:12:12 PM	Main Vac valve opened
3/26/2011	3:12:12 PM	Bypass valve opened
3/26/2011	3:12:12 PM	Helium MFC set to  100.000000
3/26/2011	3:12:12 PM	H2 MFC set to  0.000000
3/26/2011	3:12:12 PM	BCl3 MFC set to  0.000000
3/26/2011	3:12:12 PM	PHl3 MFC set to  0.000000
3/26/2011	3:12:12 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:12:12 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:12:12 PM	Tube furnace set to 0
3/26/2011	3:13:12 PM	Helium valve closed
3/26/2011	3:13:12 PM	H2 valve closed
3/26/2011	3:13:12 PM	BCl3 valve closed
3/26/2011	3:13:12 PM	PH3 valve closed
3/26/2011	3:13:12 PM	SiCl4 pre valve closed
3/26/2011	3:13:12 PM	SiCl4 post valve closed
3/26/2011	3:13:12 PM	Bubbler valve closed
3/26/2011	3:13:12 PM	Main Vac valve opened
3/26/2011	3:13:12 PM	Bypass valve opened
3/26/2011	3:13:12 PM	Helium MFC set to  0.000000
3/26/2011	3:13:12 PM	H2 MFC set to  0.000000
3/26/2011	3:13:12 PM	BCl3 MFC set to  0.000000
3/26/2011	3:13:12 PM	PHl3 MFC set to  0.000000
3/26/2011	3:13:12 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:13:12 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:13:12 PM	Tube furnace set to 0
3/26/2011	3:14:12 PM	H2 valve closed
3/26/2011	3:14:12 PM	BCl3 valve closed
3/26/2011	3:14:12 PM	PH3 valve closed
3/26/2011	3:14:12 PM	SiCl4 pre valve closed
3/26/2011	3:14:12 PM	SiCl4 post valve closed
3/26/2011	3:14:12 PM	Bubbler valve closed
3/26/2011	3:14:12 PM	Helium valve opened
3/26/2011	3:14:12 PM	Main Vac valve opened
3/26/2011	3:14:12 PM	Bypass valve opened
3/26/2011	3:14:12 PM	Helium MFC set to  100.000000
3/26/2011	3:14:12 PM	H2 MFC set to  0.000000
3/26/2011	3:14:12 PM	BCl3 MFC set to  0.000000
3/26/2011	3:14:12 PM	PHl3 MFC set to  0.000000
3/26/2011	3:14:12 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:14:12 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:14:12 PM	Tube furnace set to 0
3/26/2011	3:15:12 PM	Helium valve closed
3/26/2011	3:15:12 PM	H2 valve closed
3/26/2011	3:15:12 PM	BCl3 valve closed
3/26/2011	3:15:12 PM	PH3 valve closed
3/26/2011	3:15:12 PM	SiCl4 pre valve closed
3/26/2011	3:15:12 PM	SiCl4 post valve closed
3/26/2011	3:15:12 PM	Bubbler valve closed
3/26/2011	3:15:12 PM	Main Vac valve opened
3/26/2011	3:15:12 PM	Bypass valve opened
3/26/2011	3:15:12 PM	Helium MFC set to  0.000000
3/26/2011	3:15:12 PM	H2 MFC set to  0.000000
3/26/2011	3:15:12 PM	BCl3 MFC set to  0.000000
3/26/2011	3:15:12 PM	PHl3 MFC set to  0.000000
3/26/2011	3:15:12 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:15:12 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:15:12 PM	Tube furnace set to 0
3/26/2011	3:16:12 PM	H2 valve closed
3/26/2011	3:16:12 PM	BCl3 valve closed
3/26/2011	3:16:12 PM	PH3 valve closed
3/26/2011	3:16:12 PM	SiCl4 pre valve closed
3/26/2011	3:16:12 PM	SiCl4 post valve closed
3/26/2011	3:16:12 PM	Bubbler valve closed
3/26/2011	3:16:12 PM	Helium valve opened
3/26/2011	3:16:12 PM	Main Vac valve opened
3/26/2011	3:16:12 PM	Bypass valve opened
3/26/2011	3:16:12 PM	Helium MFC set to  100.000000
3/26/2011	3:16:12 PM	H2 MFC set to  0.000000
3/26/2011	3:16:12 PM	BCl3 MFC set to  0.000000
3/26/2011	3:16:12 PM	PHl3 MFC set to  0.000000
3/26/2011	3:16:12 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:16:12 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:16:12 PM	Tube furnace set to 0
3/26/2011	3:17:13 PM	Helium valve closed
3/26/2011	3:17:13 PM	H2 valve closed
3/26/2011	3:17:13 PM	BCl3 valve closed
3/26/2011	3:17:13 PM	PH3 valve closed
3/26/2011	3:17:13 PM	SiCl4 pre valve closed
3/26/2011	3:17:13 PM	SiCl4 post valve closed
3/26/2011	3:17:13 PM	Bubbler valve closed
3/26/2011	3:17:13 PM	Main Vac valve opened
3/26/2011	3:17:13 PM	Bypass valve opened
3/26/2011	3:17:13 PM	Helium MFC set to  0.000000
3/26/2011	3:17:13 PM	H2 MFC set to  0.000000
3/26/2011	3:17:13 PM	BCl3 MFC set to  0.000000
3/26/2011	3:17:13 PM	PHl3 MFC set to  0.000000
3/26/2011	3:17:13 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:17:13 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:17:13 PM	Tube furnace set to 0
3/26/2011	3:18:13 PM	H2 valve closed
3/26/2011	3:18:13 PM	BCl3 valve closed
3/26/2011	3:18:13 PM	PH3 valve closed
3/26/2011	3:18:13 PM	SiCl4 pre valve closed
3/26/2011	3:18:13 PM	SiCl4 post valve closed
3/26/2011	3:18:13 PM	Bubbler valve closed
3/26/2011	3:18:13 PM	Helium valve opened
3/26/2011	3:18:13 PM	Main Vac valve opened
3/26/2011	3:18:13 PM	Bypass valve opened
3/26/2011	3:18:13 PM	Helium MFC set to  100.000000
3/26/2011	3:18:13 PM	H2 MFC set to  0.000000
3/26/2011	3:18:13 PM	BCl3 MFC set to  0.000000
3/26/2011	3:18:13 PM	PHl3 MFC set to  0.000000
3/26/2011	3:18:13 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:18:13 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:18:13 PM	Tube furnace set to 0
3/26/2011	3:19:13 PM	Helium valve closed
3/26/2011	3:19:13 PM	H2 valve closed
3/26/2011	3:19:13 PM	BCl3 valve closed
3/26/2011	3:19:13 PM	PH3 valve closed
3/26/2011	3:19:13 PM	SiCl4 pre valve closed
3/26/2011	3:19:13 PM	SiCl4 post valve closed
3/26/2011	3:19:13 PM	Bubbler valve closed
3/26/2011	3:19:13 PM	Main Vac valve opened
3/26/2011	3:19:13 PM	Bypass valve opened
3/26/2011	3:19:13 PM	Helium MFC set to  0.000000
3/26/2011	3:19:13 PM	H2 MFC set to  0.000000
3/26/2011	3:19:13 PM	BCl3 MFC set to  0.000000
3/26/2011	3:19:13 PM	PHl3 MFC set to  0.000000
3/26/2011	3:19:13 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:19:13 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:19:13 PM	Tube furnace set to 0
3/26/2011	3:20:13 PM	H2 valve closed
3/26/2011	3:20:13 PM	BCl3 valve closed
3/26/2011	3:20:13 PM	PH3 valve closed
3/26/2011	3:20:13 PM	SiCl4 pre valve closed
3/26/2011	3:20:13 PM	SiCl4 post valve closed
3/26/2011	3:20:13 PM	Bubbler valve closed
3/26/2011	3:20:13 PM	Helium valve opened
3/26/2011	3:20:13 PM	Main Vac valve opened
3/26/2011	3:20:13 PM	Bypass valve opened
3/26/2011	3:20:13 PM	Helium MFC set to  100.000000
3/26/2011	3:20:13 PM	H2 MFC set to  0.000000
3/26/2011	3:20:13 PM	BCl3 MFC set to  0.000000
3/26/2011	3:20:13 PM	PHl3 MFC set to  0.000000
3/26/2011	3:20:13 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:20:13 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:20:13 PM	Tube furnace set to 0
3/26/2011	3:21:13 PM	Helium valve closed
3/26/2011	3:21:13 PM	H2 valve closed
3/26/2011	3:21:13 PM	BCl3 valve closed
3/26/2011	3:21:13 PM	PH3 valve closed
3/26/2011	3:21:13 PM	SiCl4 pre valve closed
3/26/2011	3:21:13 PM	SiCl4 post valve closed
3/26/2011	3:21:13 PM	Bubbler valve closed
3/26/2011	3:21:13 PM	Main Vac valve opened
3/26/2011	3:21:13 PM	Bypass valve opened
3/26/2011	3:21:13 PM	Helium MFC set to  0.000000
3/26/2011	3:21:13 PM	H2 MFC set to  0.000000
3/26/2011	3:21:13 PM	BCl3 MFC set to  0.000000
3/26/2011	3:21:13 PM	PHl3 MFC set to  0.000000
3/26/2011	3:21:13 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:21:13 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:21:13 PM	Tube furnace set to 0
3/26/2011	3:22:14 PM	H2 valve closed
3/26/2011	3:22:14 PM	BCl3 valve closed
3/26/2011	3:22:14 PM	PH3 valve closed
3/26/2011	3:22:14 PM	SiCl4 pre valve closed
3/26/2011	3:22:14 PM	SiCl4 post valve closed
3/26/2011	3:22:14 PM	Bubbler valve closed
3/26/2011	3:22:14 PM	Helium valve opened
3/26/2011	3:22:14 PM	Main Vac valve opened
3/26/2011	3:22:14 PM	Bypass valve opened
3/26/2011	3:22:14 PM	Helium MFC set to  100.000000
3/26/2011	3:22:14 PM	H2 MFC set to  0.000000
3/26/2011	3:22:14 PM	BCl3 MFC set to  0.000000
3/26/2011	3:22:14 PM	PHl3 MFC set to  0.000000
3/26/2011	3:22:14 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:22:14 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:22:14 PM	Tube furnace set to 0
3/26/2011	3:23:14 PM	Helium valve closed
3/26/2011	3:23:14 PM	H2 valve closed
3/26/2011	3:23:14 PM	BCl3 valve closed
3/26/2011	3:23:14 PM	PH3 valve closed
3/26/2011	3:23:14 PM	SiCl4 pre valve closed
3/26/2011	3:23:14 PM	SiCl4 post valve closed
3/26/2011	3:23:14 PM	Bubbler valve closed
3/26/2011	3:23:14 PM	Main Vac valve opened
3/26/2011	3:23:14 PM	Bypass valve opened
3/26/2011	3:23:14 PM	Helium MFC set to  0.000000
3/26/2011	3:23:14 PM	H2 MFC set to  0.000000
3/26/2011	3:23:14 PM	BCl3 MFC set to  0.000000
3/26/2011	3:23:14 PM	PHl3 MFC set to  0.000000
3/26/2011	3:23:14 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:23:14 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:23:14 PM	Tube furnace set to 0
3/26/2011	3:24:14 PM	H2 valve closed
3/26/2011	3:24:14 PM	BCl3 valve closed
3/26/2011	3:24:14 PM	PH3 valve closed
3/26/2011	3:24:14 PM	SiCl4 pre valve closed
3/26/2011	3:24:14 PM	SiCl4 post valve closed
3/26/2011	3:24:14 PM	Bubbler valve closed
3/26/2011	3:24:14 PM	Helium valve opened
3/26/2011	3:24:14 PM	Main Vac valve opened
3/26/2011	3:24:14 PM	Bypass valve opened
3/26/2011	3:24:14 PM	Helium MFC set to  100.000000
3/26/2011	3:24:14 PM	H2 MFC set to  0.000000
3/26/2011	3:24:14 PM	BCl3 MFC set to  0.000000
3/26/2011	3:24:14 PM	PHl3 MFC set to  0.000000
3/26/2011	3:24:14 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:24:14 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:24:14 PM	Tube furnace set to 0
3/26/2011	3:25:14 PM	Helium valve closed
3/26/2011	3:25:14 PM	H2 valve closed
3/26/2011	3:25:14 PM	BCl3 valve closed
3/26/2011	3:25:14 PM	PH3 valve closed
3/26/2011	3:25:14 PM	SiCl4 pre valve closed
3/26/2011	3:25:14 PM	SiCl4 post valve closed
3/26/2011	3:25:14 PM	Bubbler valve closed
3/26/2011	3:25:14 PM	Main Vac valve opened
3/26/2011	3:25:14 PM	Bypass valve opened
3/26/2011	3:25:14 PM	Helium MFC set to  0.000000
3/26/2011	3:25:14 PM	H2 MFC set to  0.000000
3/26/2011	3:25:14 PM	BCl3 MFC set to  0.000000
3/26/2011	3:25:14 PM	PHl3 MFC set to  0.000000
3/26/2011	3:25:14 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:25:14 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:25:14 PM	Tube furnace set to 0
3/26/2011	3:25:15 PM	Run finished at 3:25 PM
3/26/2011	3:25:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/26/2011	3:49:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/26/2011	3:50:07 PM	Recipe started at 3:50 PM
3/26/2011	3:50:07 PM	Helium valve closed
3/26/2011	3:50:07 PM	H2 valve closed
3/26/2011	3:50:07 PM	BCl3 valve closed
3/26/2011	3:50:07 PM	PH3 valve closed
3/26/2011	3:50:07 PM	SiCl4 pre valve closed
3/26/2011	3:50:07 PM	SiCl4 post valve closed
3/26/2011	3:50:07 PM	Main Vac valve closed
3/26/2011	3:50:07 PM	Bubbler valve closed
3/26/2011	3:50:07 PM	Bypass valve opened
3/26/2011	3:50:07 PM	Helium MFC set to  0.000000
3/26/2011	3:50:07 PM	H2 MFC set to  0.000000
3/26/2011	3:50:07 PM	BCl3 MFC set to  0.000000
3/26/2011	3:50:07 PM	PHl3 MFC set to  0.000000
3/26/2011	3:50:07 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:50:07 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:50:07 PM	Tube furnace set to 0
3/26/2011	3:50:08 PM	Helium valve closed
3/26/2011	3:50:08 PM	H2 valve closed
3/26/2011	3:50:08 PM	BCl3 valve closed
3/26/2011	3:50:08 PM	PH3 valve closed
3/26/2011	3:50:08 PM	SiCl4 pre valve closed
3/26/2011	3:50:08 PM	SiCl4 post valve closed
3/26/2011	3:50:08 PM	Bubbler valve closed
3/26/2011	3:50:08 PM	Main Vac valve opened
3/26/2011	3:50:08 PM	Bypass valve opened
3/26/2011	3:50:08 PM	Helium MFC set to  0.000000
3/26/2011	3:50:08 PM	H2 MFC set to  0.000000
3/26/2011	3:50:08 PM	BCl3 MFC set to  0.000000
3/26/2011	3:50:08 PM	PHl3 MFC set to  0.000000
3/26/2011	3:50:08 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:50:08 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:50:08 PM	Tube furnace set to 0
3/26/2011	3:51:08 PM	H2 valve closed
3/26/2011	3:51:08 PM	BCl3 valve closed
3/26/2011	3:51:08 PM	PH3 valve closed
3/26/2011	3:51:08 PM	SiCl4 pre valve closed
3/26/2011	3:51:08 PM	SiCl4 post valve closed
3/26/2011	3:51:08 PM	Bubbler valve closed
3/26/2011	3:51:08 PM	Helium valve opened
3/26/2011	3:51:08 PM	Main Vac valve opened
3/26/2011	3:51:08 PM	Bypass valve opened
3/26/2011	3:51:08 PM	Helium MFC set to  100.000000
3/26/2011	3:51:08 PM	H2 MFC set to  0.000000
3/26/2011	3:51:08 PM	BCl3 MFC set to  0.000000
3/26/2011	3:51:08 PM	PHl3 MFC set to  0.000000
3/26/2011	3:51:08 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:51:08 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:51:08 PM	Tube furnace set to 0
3/26/2011	3:52:08 PM	Helium valve closed
3/26/2011	3:52:08 PM	H2 valve closed
3/26/2011	3:52:08 PM	BCl3 valve closed
3/26/2011	3:52:08 PM	PH3 valve closed
3/26/2011	3:52:08 PM	SiCl4 pre valve closed
3/26/2011	3:52:08 PM	SiCl4 post valve closed
3/26/2011	3:52:08 PM	Bubbler valve closed
3/26/2011	3:52:08 PM	Main Vac valve opened
3/26/2011	3:52:08 PM	Bypass valve opened
3/26/2011	3:52:08 PM	Helium MFC set to  0.000000
3/26/2011	3:52:08 PM	H2 MFC set to  0.000000
3/26/2011	3:52:08 PM	BCl3 MFC set to  0.000000
3/26/2011	3:52:08 PM	PHl3 MFC set to  0.000000
3/26/2011	3:52:08 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:52:08 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:52:08 PM	Tube furnace set to 0
3/26/2011	3:53:08 PM	H2 valve closed
3/26/2011	3:53:08 PM	BCl3 valve closed
3/26/2011	3:53:08 PM	PH3 valve closed
3/26/2011	3:53:08 PM	SiCl4 pre valve closed
3/26/2011	3:53:08 PM	SiCl4 post valve closed
3/26/2011	3:53:08 PM	Bubbler valve closed
3/26/2011	3:53:08 PM	Helium valve opened
3/26/2011	3:53:08 PM	Main Vac valve opened
3/26/2011	3:53:08 PM	Bypass valve opened
3/26/2011	3:53:08 PM	Helium MFC set to  100.000000
3/26/2011	3:53:08 PM	H2 MFC set to  0.000000
3/26/2011	3:53:08 PM	BCl3 MFC set to  0.000000
3/26/2011	3:53:08 PM	PHl3 MFC set to  0.000000
3/26/2011	3:53:08 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:53:08 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:53:09 PM	Tube furnace set to 0
3/26/2011	3:54:09 PM	Helium valve closed
3/26/2011	3:54:09 PM	H2 valve closed
3/26/2011	3:54:09 PM	BCl3 valve closed
3/26/2011	3:54:09 PM	PH3 valve closed
3/26/2011	3:54:09 PM	SiCl4 pre valve closed
3/26/2011	3:54:09 PM	SiCl4 post valve closed
3/26/2011	3:54:09 PM	Bubbler valve closed
3/26/2011	3:54:09 PM	Main Vac valve opened
3/26/2011	3:54:09 PM	Bypass valve opened
3/26/2011	3:54:09 PM	Helium MFC set to  0.000000
3/26/2011	3:54:09 PM	H2 MFC set to  0.000000
3/26/2011	3:54:09 PM	BCl3 MFC set to  0.000000
3/26/2011	3:54:09 PM	PHl3 MFC set to  0.000000
3/26/2011	3:54:09 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:54:09 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:54:09 PM	Tube furnace set to 0
3/26/2011	3:54:38 PM	Run aborted at 3:54 PM
3/26/2011	3:54:38 PM	Helium valve closed
3/26/2011	3:54:38 PM	H2 valve closed
3/26/2011	3:54:38 PM	BCl3 valve closed
3/26/2011	3:54:38 PM	PH3 valve closed
3/26/2011	3:54:38 PM	SiCl4 pre valve closed
3/26/2011	3:54:38 PM	SiCl4 post valve closed
3/26/2011	3:54:38 PM	Bypass valve closed
3/26/2011	3:54:38 PM	Main Vac valve closed
3/26/2011	3:54:38 PM	Bubbler valve closed
3/26/2011	3:54:38 PM	Helium MFC set to  0.000000
3/26/2011	3:54:38 PM	H2 MFC set to  0.000000
3/26/2011	3:54:38 PM	BCl3 MFC set to  0.000000
3/26/2011	3:54:38 PM	PHl3 MFC set to  0.000000
3/26/2011	3:54:38 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:54:39 PM	Tube furnace set to 0
3/26/2011	3:54:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/26/2011	3:54:42 PM	Bypass valve opened
3/26/2011	3:54:42 PM	Main Vac valve opened
3/26/2011	3:55:15 PM	Recipe started at 3:55 PM
3/26/2011	3:55:15 PM	Helium valve closed
3/26/2011	3:55:15 PM	BCl3 valve closed
3/26/2011	3:55:15 PM	PH3 valve closed
3/26/2011	3:55:15 PM	SiCl4 pre valve closed
3/26/2011	3:55:15 PM	SiCl4 post valve closed
3/26/2011	3:55:15 PM	Main Vac valve closed
3/26/2011	3:55:15 PM	Bypass valve closed
3/26/2011	3:55:15 PM	Bubbler valve closed
3/26/2011	3:55:16 PM	H2 valve opened
3/26/2011	3:55:16 PM	Helium MFC set to  0.000000
3/26/2011	3:55:16 PM	H2 MFC set to  500.000000
3/26/2011	3:55:16 PM	BCl3 MFC set to  0.000000
3/26/2011	3:55:16 PM	PHl3 MFC set to  0.000000
3/26/2011	3:55:16 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:55:16 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:55:16 PM	Tube furnace set to 0
3/26/2011	3:56:36 PM	Helium valve closed
3/26/2011	3:56:36 PM	BCl3 valve closed
3/26/2011	3:56:36 PM	PH3 valve closed
3/26/2011	3:56:36 PM	SiCl4 pre valve closed
3/26/2011	3:56:36 PM	SiCl4 post valve closed
3/26/2011	3:56:36 PM	Main Vac valve closed
3/26/2011	3:56:36 PM	Bypass valve closed
3/26/2011	3:56:36 PM	H2 valve opened
3/26/2011	3:56:36 PM	Bubbler valve opened
3/26/2011	3:56:36 PM	Helium MFC set to  0.000000
3/26/2011	3:56:36 PM	H2 MFC set to  500.000000
3/26/2011	3:56:36 PM	BCl3 MFC set to  0.000000
3/26/2011	3:56:36 PM	PHl3 MFC set to  0.000000
3/26/2011	3:56:36 PM	SiCl4 MFC set to  0.000000
3/26/2011	3:56:36 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	3:56:37 PM	Tube furnace set to 1050
3/26/2011	4:16:37 PM	Helium valve closed
3/26/2011	4:16:37 PM	BCl3 valve closed
3/26/2011	4:16:37 PM	PH3 valve closed
3/26/2011	4:16:37 PM	Main Vac valve closed
3/26/2011	4:16:37 PM	Bypass valve closed
3/26/2011	4:16:37 PM	H2 valve opened
3/26/2011	4:16:37 PM	SiCl4 pre valve opened
3/26/2011	4:16:37 PM	SiCl4 post valve opened
3/26/2011	4:16:37 PM	Bubbler valve opened
3/26/2011	4:16:37 PM	Helium MFC set to  0.000000
3/26/2011	4:16:37 PM	H2 MFC set to  500.000000
3/26/2011	4:16:37 PM	BCl3 MFC set to  0.000000
3/26/2011	4:16:37 PM	PHl3 MFC set to  0.000000
3/26/2011	4:16:37 PM	SiCl4 MFC set to  50.000000
3/26/2011	4:16:37 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	4:16:37 PM	Tube furnace set to 1050
3/26/2011	4:36:37 PM	H2 valve closed
3/26/2011	4:36:37 PM	BCl3 valve closed
3/26/2011	4:36:37 PM	PH3 valve closed
3/26/2011	4:36:37 PM	SiCl4 pre valve closed
3/26/2011	4:36:37 PM	SiCl4 post valve closed
3/26/2011	4:36:37 PM	Main Vac valve closed
3/26/2011	4:36:37 PM	Bypass valve closed
3/26/2011	4:36:37 PM	Helium valve opened
3/26/2011	4:36:37 PM	Bubbler valve opened
3/26/2011	4:36:37 PM	Helium MFC set to  500.000000
3/26/2011	4:36:37 PM	H2 MFC set to  0.000000
3/26/2011	4:36:37 PM	BCl3 MFC set to  0.000000
3/26/2011	4:36:37 PM	PHl3 MFC set to  0.000000
3/26/2011	4:36:37 PM	SiCl4 MFC set to  0.000000
3/26/2011	4:36:37 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	4:36:37 PM	Tube furnace set to 0
3/26/2011	4:56:37 PM	Helium valve closed
3/26/2011	4:56:37 PM	H2 valve closed
3/26/2011	4:56:37 PM	BCl3 valve closed
3/26/2011	4:56:37 PM	PH3 valve closed
3/26/2011	4:56:37 PM	SiCl4 pre valve closed
3/26/2011	4:56:37 PM	SiCl4 post valve closed
3/26/2011	4:56:37 PM	Main Vac valve closed
3/26/2011	4:56:37 PM	Bypass valve closed
3/26/2011	4:56:37 PM	Bubbler valve closed
3/26/2011	4:56:37 PM	Helium MFC set to  0.000000
3/26/2011	4:56:37 PM	H2 MFC set to  0.000000
3/26/2011	4:56:37 PM	BCl3 MFC set to  0.000000
3/26/2011	4:56:37 PM	PHl3 MFC set to  0.000000
3/26/2011	4:56:37 PM	SiCl4 MFC set to  0.000000
3/26/2011	4:56:37 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	4:56:37 PM	Tube furnace set to 0
3/26/2011	4:56:37 PM	Run finished at 4:56 PM
3/26/2011	5:10:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/26/2011	5:10:16 PM	Recipe started at 5:10 PM
3/26/2011	5:10:16 PM	H2 valve closed
3/26/2011	5:10:16 PM	BCl3 valve closed
3/26/2011	5:10:16 PM	PH3 valve closed
3/26/2011	5:10:16 PM	SiCl4 pre valve closed
3/26/2011	5:10:16 PM	SiCl4 post valve closed
3/26/2011	5:10:16 PM	Main Vac valve closed
3/26/2011	5:10:16 PM	Bypass valve closed
3/26/2011	5:10:16 PM	Bubbler valve closed
3/26/2011	5:10:16 PM	Helium valve opened
3/26/2011	5:10:16 PM	Helium MFC set to  500.000000
3/26/2011	5:10:16 PM	H2 MFC set to  0.000000
3/26/2011	5:10:16 PM	BCl3 MFC set to  0.000000
3/26/2011	5:10:16 PM	PHl3 MFC set to  0.000000
3/26/2011	5:10:16 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:10:16 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:10:16 PM	Tube furnace set to 0
3/26/2011	5:10:20 PM	Helium valve closed
3/26/2011	5:10:20 PM	H2 valve closed
3/26/2011	5:10:20 PM	BCl3 valve closed
3/26/2011	5:10:20 PM	PH3 valve closed
3/26/2011	5:10:20 PM	SiCl4 pre valve closed
3/26/2011	5:10:20 PM	SiCl4 post valve closed
3/26/2011	5:10:20 PM	Main Vac valve closed
3/26/2011	5:10:20 PM	Bypass valve closed
3/26/2011	5:10:20 PM	Bubbler valve closed
3/26/2011	5:10:20 PM	Helium MFC set to  0.000000
3/26/2011	5:10:20 PM	H2 MFC set to  0.000000
3/26/2011	5:10:20 PM	BCl3 MFC set to  0.000000
3/26/2011	5:10:20 PM	PHl3 MFC set to  0.000000
3/26/2011	5:10:20 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:10:20 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:10:21 PM	Tube furnace set to 0
3/26/2011	5:10:21 PM	Run finished at 5:10 PM
3/26/2011	5:10:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/26/2011	5:15:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	5:15:25 PM	Recipe started at 5:15 PM
3/26/2011	5:15:25 PM	Helium valve closed
3/26/2011	5:15:25 PM	H2 valve closed
3/26/2011	5:15:25 PM	BCl3 valve closed
3/26/2011	5:15:25 PM	PH3 valve closed
3/26/2011	5:15:25 PM	SiCl4 pre valve closed
3/26/2011	5:15:25 PM	SiCl4 post valve closed
3/26/2011	5:15:25 PM	Main Vac valve closed
3/26/2011	5:15:25 PM	Bubbler valve closed
3/26/2011	5:15:25 PM	Bypass valve opened
3/26/2011	5:15:25 PM	Helium MFC set to  0.000000
3/26/2011	5:15:25 PM	H2 MFC set to  0.000000
3/26/2011	5:15:25 PM	BCl3 MFC set to  0.000000
3/26/2011	5:15:25 PM	PHl3 MFC set to  0.000000
3/26/2011	5:15:25 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:15:25 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:15:26 PM	Tube furnace set to 0
3/26/2011	5:15:58 PM	Helium valve closed
3/26/2011	5:15:58 PM	H2 valve closed
3/26/2011	5:15:58 PM	BCl3 valve closed
3/26/2011	5:15:58 PM	PH3 valve closed
3/26/2011	5:15:58 PM	SiCl4 pre valve closed
3/26/2011	5:15:58 PM	SiCl4 post valve closed
3/26/2011	5:15:58 PM	Bubbler valve closed
3/26/2011	5:15:58 PM	Main Vac valve opened
3/26/2011	5:15:58 PM	Bypass valve opened
3/26/2011	5:15:58 PM	Helium MFC set to  0.000000
3/26/2011	5:15:58 PM	H2 MFC set to  0.000000
3/26/2011	5:15:58 PM	BCl3 MFC set to  0.000000
3/26/2011	5:15:58 PM	PHl3 MFC set to  0.000000
3/26/2011	5:15:58 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:15:58 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:15:58 PM	Tube furnace set to 0
3/26/2011	5:15:58 PM	Run finished at 5:15 PM
3/26/2011	5:15:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	5:39:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/26/2011	5:39:28 PM	Recipe started at 5:39 PM
3/26/2011	5:39:28 PM	Helium valve closed
3/26/2011	5:39:28 PM	H2 valve closed
3/26/2011	5:39:28 PM	BCl3 valve closed
3/26/2011	5:39:28 PM	PH3 valve closed
3/26/2011	5:39:28 PM	SiCl4 pre valve closed
3/26/2011	5:39:28 PM	SiCl4 post valve closed
3/26/2011	5:39:28 PM	Main Vac valve closed
3/26/2011	5:39:28 PM	Bubbler valve closed
3/26/2011	5:39:28 PM	Bypass valve opened
3/26/2011	5:39:28 PM	Helium MFC set to  0.000000
3/26/2011	5:39:28 PM	H2 MFC set to  0.000000
3/26/2011	5:39:28 PM	BCl3 MFC set to  0.000000
3/26/2011	5:39:28 PM	PHl3 MFC set to  0.000000
3/26/2011	5:39:28 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:39:28 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:39:28 PM	Tube furnace set to 0
3/26/2011	5:39:28 PM	Helium valve closed
3/26/2011	5:39:28 PM	H2 valve closed
3/26/2011	5:39:28 PM	BCl3 valve closed
3/26/2011	5:39:28 PM	PH3 valve closed
3/26/2011	5:39:28 PM	SiCl4 pre valve closed
3/26/2011	5:39:28 PM	SiCl4 post valve closed
3/26/2011	5:39:28 PM	Bubbler valve closed
3/26/2011	5:39:28 PM	Main Vac valve opened
3/26/2011	5:39:28 PM	Bypass valve opened
3/26/2011	5:39:28 PM	Helium MFC set to  0.000000
3/26/2011	5:39:28 PM	H2 MFC set to  0.000000
3/26/2011	5:39:28 PM	BCl3 MFC set to  0.000000
3/26/2011	5:39:28 PM	PHl3 MFC set to  0.000000
3/26/2011	5:39:28 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:39:28 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:39:28 PM	Tube furnace set to 0
3/26/2011	5:40:28 PM	H2 valve closed
3/26/2011	5:40:28 PM	BCl3 valve closed
3/26/2011	5:40:28 PM	PH3 valve closed
3/26/2011	5:40:28 PM	SiCl4 pre valve closed
3/26/2011	5:40:28 PM	SiCl4 post valve closed
3/26/2011	5:40:28 PM	Bubbler valve closed
3/26/2011	5:40:28 PM	Helium valve opened
3/26/2011	5:40:28 PM	Main Vac valve opened
3/26/2011	5:40:28 PM	Bypass valve opened
3/26/2011	5:40:28 PM	Helium MFC set to  100.000000
3/26/2011	5:40:28 PM	H2 MFC set to  0.000000
3/26/2011	5:40:28 PM	BCl3 MFC set to  0.000000
3/26/2011	5:40:28 PM	PHl3 MFC set to  0.000000
3/26/2011	5:40:28 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:40:28 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:40:28 PM	Tube furnace set to 0
3/26/2011	5:41:28 PM	Helium valve closed
3/26/2011	5:41:28 PM	H2 valve closed
3/26/2011	5:41:28 PM	BCl3 valve closed
3/26/2011	5:41:28 PM	PH3 valve closed
3/26/2011	5:41:28 PM	SiCl4 pre valve closed
3/26/2011	5:41:28 PM	SiCl4 post valve closed
3/26/2011	5:41:28 PM	Bubbler valve closed
3/26/2011	5:41:28 PM	Main Vac valve opened
3/26/2011	5:41:28 PM	Bypass valve opened
3/26/2011	5:41:28 PM	Helium MFC set to  0.000000
3/26/2011	5:41:28 PM	H2 MFC set to  0.000000
3/26/2011	5:41:28 PM	BCl3 MFC set to  0.000000
3/26/2011	5:41:28 PM	PHl3 MFC set to  0.000000
3/26/2011	5:41:28 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:41:28 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:41:29 PM	Tube furnace set to 0
3/26/2011	5:42:29 PM	H2 valve closed
3/26/2011	5:42:29 PM	BCl3 valve closed
3/26/2011	5:42:29 PM	PH3 valve closed
3/26/2011	5:42:29 PM	SiCl4 pre valve closed
3/26/2011	5:42:29 PM	SiCl4 post valve closed
3/26/2011	5:42:29 PM	Bubbler valve closed
3/26/2011	5:42:29 PM	Helium valve opened
3/26/2011	5:42:29 PM	Main Vac valve opened
3/26/2011	5:42:29 PM	Bypass valve opened
3/26/2011	5:42:29 PM	Helium MFC set to  100.000000
3/26/2011	5:42:29 PM	H2 MFC set to  0.000000
3/26/2011	5:42:29 PM	BCl3 MFC set to  0.000000
3/26/2011	5:42:29 PM	PHl3 MFC set to  0.000000
3/26/2011	5:42:29 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:42:29 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:42:29 PM	Tube furnace set to 0
3/26/2011	5:43:29 PM	Helium valve closed
3/26/2011	5:43:29 PM	H2 valve closed
3/26/2011	5:43:29 PM	BCl3 valve closed
3/26/2011	5:43:29 PM	PH3 valve closed
3/26/2011	5:43:29 PM	SiCl4 pre valve closed
3/26/2011	5:43:29 PM	SiCl4 post valve closed
3/26/2011	5:43:29 PM	Bubbler valve closed
3/26/2011	5:43:29 PM	Main Vac valve opened
3/26/2011	5:43:29 PM	Bypass valve opened
3/26/2011	5:43:29 PM	Helium MFC set to  0.000000
3/26/2011	5:43:29 PM	H2 MFC set to  0.000000
3/26/2011	5:43:29 PM	BCl3 MFC set to  0.000000
3/26/2011	5:43:29 PM	PHl3 MFC set to  0.000000
3/26/2011	5:43:29 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:43:29 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:43:29 PM	Tube furnace set to 0
3/26/2011	5:44:29 PM	H2 valve closed
3/26/2011	5:44:29 PM	BCl3 valve closed
3/26/2011	5:44:29 PM	PH3 valve closed
3/26/2011	5:44:29 PM	SiCl4 pre valve closed
3/26/2011	5:44:29 PM	SiCl4 post valve closed
3/26/2011	5:44:29 PM	Bubbler valve closed
3/26/2011	5:44:29 PM	Helium valve opened
3/26/2011	5:44:29 PM	Main Vac valve opened
3/26/2011	5:44:29 PM	Bypass valve opened
3/26/2011	5:44:29 PM	Helium MFC set to  100.000000
3/26/2011	5:44:29 PM	H2 MFC set to  0.000000
3/26/2011	5:44:29 PM	BCl3 MFC set to  0.000000
3/26/2011	5:44:29 PM	PHl3 MFC set to  0.000000
3/26/2011	5:44:29 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:44:29 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:44:29 PM	Tube furnace set to 0
3/26/2011	5:45:29 PM	Helium valve closed
3/26/2011	5:45:29 PM	H2 valve closed
3/26/2011	5:45:29 PM	BCl3 valve closed
3/26/2011	5:45:29 PM	PH3 valve closed
3/26/2011	5:45:29 PM	SiCl4 pre valve closed
3/26/2011	5:45:29 PM	SiCl4 post valve closed
3/26/2011	5:45:29 PM	Bubbler valve closed
3/26/2011	5:45:29 PM	Main Vac valve opened
3/26/2011	5:45:29 PM	Bypass valve opened
3/26/2011	5:45:29 PM	Helium MFC set to  0.000000
3/26/2011	5:45:29 PM	H2 MFC set to  0.000000
3/26/2011	5:45:29 PM	BCl3 MFC set to  0.000000
3/26/2011	5:45:29 PM	PHl3 MFC set to  0.000000
3/26/2011	5:45:29 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:45:29 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:45:29 PM	Tube furnace set to 0
3/26/2011	5:46:29 PM	H2 valve closed
3/26/2011	5:46:29 PM	BCl3 valve closed
3/26/2011	5:46:29 PM	PH3 valve closed
3/26/2011	5:46:29 PM	SiCl4 pre valve closed
3/26/2011	5:46:29 PM	SiCl4 post valve closed
3/26/2011	5:46:29 PM	Bubbler valve closed
3/26/2011	5:46:29 PM	Helium valve opened
3/26/2011	5:46:29 PM	Main Vac valve opened
3/26/2011	5:46:29 PM	Bypass valve opened
3/26/2011	5:46:29 PM	Helium MFC set to  100.000000
3/26/2011	5:46:29 PM	H2 MFC set to  0.000000
3/26/2011	5:46:29 PM	BCl3 MFC set to  0.000000
3/26/2011	5:46:29 PM	PHl3 MFC set to  0.000000
3/26/2011	5:46:29 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:46:29 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:46:30 PM	Tube furnace set to 0
3/26/2011	5:47:30 PM	Helium valve closed
3/26/2011	5:47:30 PM	H2 valve closed
3/26/2011	5:47:30 PM	BCl3 valve closed
3/26/2011	5:47:30 PM	PH3 valve closed
3/26/2011	5:47:30 PM	SiCl4 pre valve closed
3/26/2011	5:47:30 PM	SiCl4 post valve closed
3/26/2011	5:47:30 PM	Bubbler valve closed
3/26/2011	5:47:30 PM	Main Vac valve opened
3/26/2011	5:47:30 PM	Bypass valve opened
3/26/2011	5:47:30 PM	Helium MFC set to  0.000000
3/26/2011	5:47:30 PM	H2 MFC set to  0.000000
3/26/2011	5:47:30 PM	BCl3 MFC set to  0.000000
3/26/2011	5:47:30 PM	PHl3 MFC set to  0.000000
3/26/2011	5:47:30 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:47:30 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:47:30 PM	Tube furnace set to 0
3/26/2011	5:48:30 PM	H2 valve closed
3/26/2011	5:48:30 PM	BCl3 valve closed
3/26/2011	5:48:30 PM	PH3 valve closed
3/26/2011	5:48:30 PM	SiCl4 pre valve closed
3/26/2011	5:48:30 PM	SiCl4 post valve closed
3/26/2011	5:48:30 PM	Bubbler valve closed
3/26/2011	5:48:30 PM	Helium valve opened
3/26/2011	5:48:30 PM	Main Vac valve opened
3/26/2011	5:48:30 PM	Bypass valve opened
3/26/2011	5:48:30 PM	Helium MFC set to  100.000000
3/26/2011	5:48:30 PM	H2 MFC set to  0.000000
3/26/2011	5:48:30 PM	BCl3 MFC set to  0.000000
3/26/2011	5:48:30 PM	PHl3 MFC set to  0.000000
3/26/2011	5:48:30 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:48:30 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:48:30 PM	Tube furnace set to 0
3/26/2011	5:49:30 PM	Helium valve closed
3/26/2011	5:49:30 PM	H2 valve closed
3/26/2011	5:49:30 PM	BCl3 valve closed
3/26/2011	5:49:30 PM	PH3 valve closed
3/26/2011	5:49:30 PM	SiCl4 pre valve closed
3/26/2011	5:49:30 PM	SiCl4 post valve closed
3/26/2011	5:49:30 PM	Bubbler valve closed
3/26/2011	5:49:30 PM	Main Vac valve opened
3/26/2011	5:49:30 PM	Bypass valve opened
3/26/2011	5:49:30 PM	Helium MFC set to  0.000000
3/26/2011	5:49:30 PM	H2 MFC set to  0.000000
3/26/2011	5:49:30 PM	BCl3 MFC set to  0.000000
3/26/2011	5:49:30 PM	PHl3 MFC set to  0.000000
3/26/2011	5:49:30 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:49:30 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:49:30 PM	Tube furnace set to 0
3/26/2011	5:50:30 PM	H2 valve closed
3/26/2011	5:50:30 PM	BCl3 valve closed
3/26/2011	5:50:30 PM	PH3 valve closed
3/26/2011	5:50:30 PM	SiCl4 pre valve closed
3/26/2011	5:50:30 PM	SiCl4 post valve closed
3/26/2011	5:50:30 PM	Bubbler valve closed
3/26/2011	5:50:30 PM	Helium valve opened
3/26/2011	5:50:30 PM	Main Vac valve opened
3/26/2011	5:50:30 PM	Bypass valve opened
3/26/2011	5:50:30 PM	Helium MFC set to  100.000000
3/26/2011	5:50:30 PM	H2 MFC set to  0.000000
3/26/2011	5:50:30 PM	BCl3 MFC set to  0.000000
3/26/2011	5:50:30 PM	PHl3 MFC set to  0.000000
3/26/2011	5:50:30 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:50:30 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:50:30 PM	Tube furnace set to 0
3/26/2011	5:51:30 PM	Helium valve closed
3/26/2011	5:51:30 PM	H2 valve closed
3/26/2011	5:51:30 PM	BCl3 valve closed
3/26/2011	5:51:30 PM	PH3 valve closed
3/26/2011	5:51:30 PM	SiCl4 pre valve closed
3/26/2011	5:51:30 PM	SiCl4 post valve closed
3/26/2011	5:51:30 PM	Bubbler valve closed
3/26/2011	5:51:30 PM	Main Vac valve opened
3/26/2011	5:51:30 PM	Bypass valve opened
3/26/2011	5:51:30 PM	Helium MFC set to  0.000000
3/26/2011	5:51:30 PM	H2 MFC set to  0.000000
3/26/2011	5:51:30 PM	BCl3 MFC set to  0.000000
3/26/2011	5:51:30 PM	PHl3 MFC set to  0.000000
3/26/2011	5:51:30 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:51:30 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:51:31 PM	Tube furnace set to 0
3/26/2011	5:52:31 PM	H2 valve closed
3/26/2011	5:52:31 PM	BCl3 valve closed
3/26/2011	5:52:31 PM	PH3 valve closed
3/26/2011	5:52:31 PM	SiCl4 pre valve closed
3/26/2011	5:52:31 PM	SiCl4 post valve closed
3/26/2011	5:52:31 PM	Bubbler valve closed
3/26/2011	5:52:31 PM	Helium valve opened
3/26/2011	5:52:31 PM	Main Vac valve opened
3/26/2011	5:52:31 PM	Bypass valve opened
3/26/2011	5:52:31 PM	Helium MFC set to  100.000000
3/26/2011	5:52:31 PM	H2 MFC set to  0.000000
3/26/2011	5:52:31 PM	BCl3 MFC set to  0.000000
3/26/2011	5:52:31 PM	PHl3 MFC set to  0.000000
3/26/2011	5:52:31 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:52:31 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:52:31 PM	Tube furnace set to 0
3/26/2011	5:53:31 PM	Helium valve closed
3/26/2011	5:53:31 PM	H2 valve closed
3/26/2011	5:53:31 PM	BCl3 valve closed
3/26/2011	5:53:31 PM	PH3 valve closed
3/26/2011	5:53:31 PM	SiCl4 pre valve closed
3/26/2011	5:53:31 PM	SiCl4 post valve closed
3/26/2011	5:53:31 PM	Bubbler valve closed
3/26/2011	5:53:31 PM	Main Vac valve opened
3/26/2011	5:53:31 PM	Bypass valve opened
3/26/2011	5:53:31 PM	Helium MFC set to  0.000000
3/26/2011	5:53:31 PM	H2 MFC set to  0.000000
3/26/2011	5:53:31 PM	BCl3 MFC set to  0.000000
3/26/2011	5:53:31 PM	PHl3 MFC set to  0.000000
3/26/2011	5:53:31 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:53:31 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:53:31 PM	Tube furnace set to 0
3/26/2011	5:54:31 PM	H2 valve closed
3/26/2011	5:54:31 PM	BCl3 valve closed
3/26/2011	5:54:31 PM	PH3 valve closed
3/26/2011	5:54:31 PM	SiCl4 pre valve closed
3/26/2011	5:54:31 PM	SiCl4 post valve closed
3/26/2011	5:54:31 PM	Bubbler valve closed
3/26/2011	5:54:31 PM	Helium valve opened
3/26/2011	5:54:31 PM	Main Vac valve opened
3/26/2011	5:54:31 PM	Bypass valve opened
3/26/2011	5:54:31 PM	Helium MFC set to  100.000000
3/26/2011	5:54:31 PM	H2 MFC set to  0.000000
3/26/2011	5:54:31 PM	BCl3 MFC set to  0.000000
3/26/2011	5:54:31 PM	PHl3 MFC set to  0.000000
3/26/2011	5:54:31 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:54:31 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:54:31 PM	Tube furnace set to 0
3/26/2011	5:55:31 PM	Helium valve closed
3/26/2011	5:55:31 PM	H2 valve closed
3/26/2011	5:55:31 PM	BCl3 valve closed
3/26/2011	5:55:31 PM	PH3 valve closed
3/26/2011	5:55:31 PM	SiCl4 pre valve closed
3/26/2011	5:55:31 PM	SiCl4 post valve closed
3/26/2011	5:55:31 PM	Bubbler valve closed
3/26/2011	5:55:31 PM	Main Vac valve opened
3/26/2011	5:55:31 PM	Bypass valve opened
3/26/2011	5:55:31 PM	Helium MFC set to  0.000000
3/26/2011	5:55:31 PM	H2 MFC set to  0.000000
3/26/2011	5:55:31 PM	BCl3 MFC set to  0.000000
3/26/2011	5:55:31 PM	PHl3 MFC set to  0.000000
3/26/2011	5:55:31 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:55:31 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:55:31 PM	Tube furnace set to 0
3/26/2011	5:56:31 PM	H2 valve closed
3/26/2011	5:56:31 PM	BCl3 valve closed
3/26/2011	5:56:31 PM	PH3 valve closed
3/26/2011	5:56:31 PM	SiCl4 pre valve closed
3/26/2011	5:56:31 PM	SiCl4 post valve closed
3/26/2011	5:56:31 PM	Bubbler valve closed
3/26/2011	5:56:31 PM	Helium valve opened
3/26/2011	5:56:31 PM	Main Vac valve opened
3/26/2011	5:56:31 PM	Bypass valve opened
3/26/2011	5:56:31 PM	Helium MFC set to  100.000000
3/26/2011	5:56:31 PM	H2 MFC set to  0.000000
3/26/2011	5:56:31 PM	BCl3 MFC set to  0.000000
3/26/2011	5:56:31 PM	PHl3 MFC set to  0.000000
3/26/2011	5:56:31 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:56:31 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:56:32 PM	Tube furnace set to 0
3/26/2011	5:57:32 PM	Helium valve closed
3/26/2011	5:57:32 PM	H2 valve closed
3/26/2011	5:57:32 PM	BCl3 valve closed
3/26/2011	5:57:32 PM	PH3 valve closed
3/26/2011	5:57:32 PM	SiCl4 pre valve closed
3/26/2011	5:57:32 PM	SiCl4 post valve closed
3/26/2011	5:57:32 PM	Bubbler valve closed
3/26/2011	5:57:32 PM	Main Vac valve opened
3/26/2011	5:57:32 PM	Bypass valve opened
3/26/2011	5:57:32 PM	Helium MFC set to  0.000000
3/26/2011	5:57:32 PM	H2 MFC set to  0.000000
3/26/2011	5:57:32 PM	BCl3 MFC set to  0.000000
3/26/2011	5:57:32 PM	PHl3 MFC set to  0.000000
3/26/2011	5:57:32 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:57:32 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:57:32 PM	Tube furnace set to 0
3/26/2011	5:57:59 PM	Run aborted at 5:57 PM
3/26/2011	5:57:59 PM	Helium valve closed
3/26/2011	5:57:59 PM	H2 valve closed
3/26/2011	5:57:59 PM	BCl3 valve closed
3/26/2011	5:57:59 PM	PH3 valve closed
3/26/2011	5:57:59 PM	SiCl4 pre valve closed
3/26/2011	5:57:59 PM	SiCl4 post valve closed
3/26/2011	5:57:59 PM	Bypass valve closed
3/26/2011	5:57:59 PM	Main Vac valve closed
3/26/2011	5:57:59 PM	Bubbler valve closed
3/26/2011	5:57:59 PM	Helium MFC set to  0.000000
3/26/2011	5:57:59 PM	H2 MFC set to  0.000000
3/26/2011	5:57:59 PM	BCl3 MFC set to  0.000000
3/26/2011	5:57:59 PM	PHl3 MFC set to  0.000000
3/26/2011	5:57:59 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:57:59 PM	Tube furnace set to 0
3/26/2011	5:57:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/26/2011	5:58:01 PM	Bypass valve opened
3/26/2011	5:58:02 PM	Main Vac valve opened
3/26/2011	5:58:46 PM	Recipe started at 5:58 PM
3/26/2011	5:58:46 PM	Helium valve closed
3/26/2011	5:58:46 PM	BCl3 valve closed
3/26/2011	5:58:46 PM	PH3 valve closed
3/26/2011	5:58:46 PM	SiCl4 pre valve closed
3/26/2011	5:58:46 PM	SiCl4 post valve closed
3/26/2011	5:58:46 PM	Main Vac valve closed
3/26/2011	5:58:46 PM	Bypass valve closed
3/26/2011	5:58:46 PM	Bubbler valve closed
3/26/2011	5:58:46 PM	H2 valve opened
3/26/2011	5:58:46 PM	Helium MFC set to  0.000000
3/26/2011	5:58:46 PM	H2 MFC set to  500.000000
3/26/2011	5:58:46 PM	BCl3 MFC set to  0.000000
3/26/2011	5:58:46 PM	PHl3 MFC set to  0.000000
3/26/2011	5:58:46 PM	SiCl4 MFC set to  0.000000
3/26/2011	5:58:46 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	5:58:46 PM	Tube furnace set to 0
3/26/2011	6:00:04 PM	Helium valve closed
3/26/2011	6:00:04 PM	BCl3 valve closed
3/26/2011	6:00:04 PM	PH3 valve closed
3/26/2011	6:00:04 PM	SiCl4 pre valve closed
3/26/2011	6:00:04 PM	SiCl4 post valve closed
3/26/2011	6:00:04 PM	Main Vac valve closed
3/26/2011	6:00:04 PM	Bypass valve closed
3/26/2011	6:00:04 PM	H2 valve opened
3/26/2011	6:00:04 PM	Bubbler valve opened
3/26/2011	6:00:04 PM	Helium MFC set to  0.000000
3/26/2011	6:00:04 PM	H2 MFC set to  500.000000
3/26/2011	6:00:04 PM	BCl3 MFC set to  0.000000
3/26/2011	6:00:04 PM	PHl3 MFC set to  0.000000
3/26/2011	6:00:04 PM	SiCl4 MFC set to  0.000000
3/26/2011	6:00:04 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	6:00:04 PM	Tube furnace set to 1075
3/26/2011	6:20:04 PM	Helium valve closed
3/26/2011	6:20:04 PM	BCl3 valve closed
3/26/2011	6:20:04 PM	PH3 valve closed
3/26/2011	6:20:04 PM	Main Vac valve closed
3/26/2011	6:20:04 PM	Bypass valve closed
3/26/2011	6:20:04 PM	H2 valve opened
3/26/2011	6:20:04 PM	SiCl4 pre valve opened
3/26/2011	6:20:04 PM	SiCl4 post valve opened
3/26/2011	6:20:04 PM	Bubbler valve opened
3/26/2011	6:20:04 PM	Helium MFC set to  0.000000
3/26/2011	6:20:04 PM	H2 MFC set to  500.000000
3/26/2011	6:20:04 PM	BCl3 MFC set to  0.000000
3/26/2011	6:20:04 PM	PHl3 MFC set to  0.000000
3/26/2011	6:20:04 PM	SiCl4 MFC set to  50.000000
3/26/2011	6:20:05 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	6:20:05 PM	Tube furnace set to 1075
3/26/2011	6:40:05 PM	H2 valve closed
3/26/2011	6:40:05 PM	BCl3 valve closed
3/26/2011	6:40:05 PM	PH3 valve closed
3/26/2011	6:40:05 PM	SiCl4 pre valve closed
3/26/2011	6:40:05 PM	SiCl4 post valve closed
3/26/2011	6:40:05 PM	Main Vac valve closed
3/26/2011	6:40:05 PM	Bypass valve closed
3/26/2011	6:40:05 PM	Helium valve opened
3/26/2011	6:40:05 PM	Bubbler valve opened
3/26/2011	6:40:05 PM	Helium MFC set to  500.000000
3/26/2011	6:40:05 PM	H2 MFC set to  0.000000
3/26/2011	6:40:05 PM	BCl3 MFC set to  0.000000
3/26/2011	6:40:05 PM	PHl3 MFC set to  0.000000
3/26/2011	6:40:05 PM	SiCl4 MFC set to  0.000000
3/26/2011	6:40:05 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	6:40:05 PM	Tube furnace set to 0
3/26/2011	7:00:05 PM	Helium valve closed
3/26/2011	7:00:05 PM	H2 valve closed
3/26/2011	7:00:05 PM	BCl3 valve closed
3/26/2011	7:00:05 PM	PH3 valve closed
3/26/2011	7:00:05 PM	SiCl4 pre valve closed
3/26/2011	7:00:05 PM	SiCl4 post valve closed
3/26/2011	7:00:05 PM	Main Vac valve closed
3/26/2011	7:00:05 PM	Bypass valve closed
3/26/2011	7:00:05 PM	Bubbler valve closed
3/26/2011	7:00:05 PM	Helium MFC set to  0.000000
3/26/2011	7:00:05 PM	H2 MFC set to  0.000000
3/26/2011	7:00:05 PM	BCl3 MFC set to  0.000000
3/26/2011	7:00:05 PM	PHl3 MFC set to  0.000000
3/26/2011	7:00:05 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:00:05 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:00:05 PM	Tube furnace set to 0
3/26/2011	7:00:05 PM	Run finished at 7:00 PM
3/26/2011	7:10:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	7:10:42 PM	Recipe started at 7:10 PM
3/26/2011	7:10:42 PM	Helium valve closed
3/26/2011	7:10:42 PM	H2 valve closed
3/26/2011	7:10:42 PM	BCl3 valve closed
3/26/2011	7:10:42 PM	PH3 valve closed
3/26/2011	7:10:42 PM	SiCl4 pre valve closed
3/26/2011	7:10:42 PM	SiCl4 post valve closed
3/26/2011	7:10:42 PM	Main Vac valve closed
3/26/2011	7:10:42 PM	Bubbler valve closed
3/26/2011	7:10:42 PM	Bypass valve opened
3/26/2011	7:10:42 PM	Helium MFC set to  0.000000
3/26/2011	7:10:42 PM	H2 MFC set to  0.000000
3/26/2011	7:10:42 PM	BCl3 MFC set to  0.000000
3/26/2011	7:10:42 PM	PHl3 MFC set to  0.000000
3/26/2011	7:10:42 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:10:42 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:10:42 PM	Tube furnace set to 0
3/26/2011	7:11:14 PM	Helium valve closed
3/26/2011	7:11:14 PM	H2 valve closed
3/26/2011	7:11:14 PM	BCl3 valve closed
3/26/2011	7:11:14 PM	PH3 valve closed
3/26/2011	7:11:14 PM	SiCl4 pre valve closed
3/26/2011	7:11:14 PM	SiCl4 post valve closed
3/26/2011	7:11:14 PM	Bubbler valve closed
3/26/2011	7:11:14 PM	Main Vac valve opened
3/26/2011	7:11:14 PM	Bypass valve opened
3/26/2011	7:11:14 PM	Helium MFC set to  0.000000
3/26/2011	7:11:14 PM	H2 MFC set to  0.000000
3/26/2011	7:11:14 PM	BCl3 MFC set to  0.000000
3/26/2011	7:11:14 PM	PHl3 MFC set to  0.000000
3/26/2011	7:11:14 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:11:14 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:11:14 PM	Tube furnace set to 0
3/26/2011	7:11:14 PM	Run finished at 7:11 PM
3/26/2011	7:11:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	7:20:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/26/2011	7:20:53 PM	Recipe started at 7:20 PM
3/26/2011	7:20:53 PM	Helium valve closed
3/26/2011	7:20:53 PM	H2 valve closed
3/26/2011	7:20:53 PM	BCl3 valve closed
3/26/2011	7:20:53 PM	PH3 valve closed
3/26/2011	7:20:53 PM	SiCl4 pre valve closed
3/26/2011	7:20:53 PM	SiCl4 post valve closed
3/26/2011	7:20:53 PM	Main Vac valve closed
3/26/2011	7:20:53 PM	Bubbler valve closed
3/26/2011	7:20:53 PM	Bypass valve opened
3/26/2011	7:20:53 PM	Helium MFC set to  0.000000
3/26/2011	7:20:53 PM	H2 MFC set to  0.000000
3/26/2011	7:20:53 PM	BCl3 MFC set to  0.000000
3/26/2011	7:20:53 PM	PHl3 MFC set to  0.000000
3/26/2011	7:20:53 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:20:53 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:20:53 PM	Tube furnace set to 0
3/26/2011	7:20:53 PM	Helium valve closed
3/26/2011	7:20:53 PM	H2 valve closed
3/26/2011	7:20:53 PM	BCl3 valve closed
3/26/2011	7:20:53 PM	PH3 valve closed
3/26/2011	7:20:53 PM	SiCl4 pre valve closed
3/26/2011	7:20:53 PM	SiCl4 post valve closed
3/26/2011	7:20:53 PM	Bubbler valve closed
3/26/2011	7:20:53 PM	Main Vac valve opened
3/26/2011	7:20:53 PM	Bypass valve opened
3/26/2011	7:20:53 PM	Helium MFC set to  0.000000
3/26/2011	7:20:53 PM	H2 MFC set to  0.000000
3/26/2011	7:20:53 PM	BCl3 MFC set to  0.000000
3/26/2011	7:20:53 PM	PHl3 MFC set to  0.000000
3/26/2011	7:20:53 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:20:53 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:20:53 PM	Tube furnace set to 0
3/26/2011	7:21:53 PM	H2 valve closed
3/26/2011	7:21:53 PM	BCl3 valve closed
3/26/2011	7:21:53 PM	PH3 valve closed
3/26/2011	7:21:53 PM	SiCl4 pre valve closed
3/26/2011	7:21:53 PM	SiCl4 post valve closed
3/26/2011	7:21:53 PM	Bubbler valve closed
3/26/2011	7:21:53 PM	Helium valve opened
3/26/2011	7:21:53 PM	Main Vac valve opened
3/26/2011	7:21:53 PM	Bypass valve opened
3/26/2011	7:21:53 PM	Helium MFC set to  100.000000
3/26/2011	7:21:53 PM	H2 MFC set to  0.000000
3/26/2011	7:21:53 PM	BCl3 MFC set to  0.000000
3/26/2011	7:21:53 PM	PHl3 MFC set to  0.000000
3/26/2011	7:21:53 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:21:53 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:21:54 PM	Tube furnace set to 0
3/26/2011	7:22:54 PM	Helium valve closed
3/26/2011	7:22:54 PM	H2 valve closed
3/26/2011	7:22:54 PM	BCl3 valve closed
3/26/2011	7:22:54 PM	PH3 valve closed
3/26/2011	7:22:54 PM	SiCl4 pre valve closed
3/26/2011	7:22:54 PM	SiCl4 post valve closed
3/26/2011	7:22:54 PM	Bubbler valve closed
3/26/2011	7:22:54 PM	Main Vac valve opened
3/26/2011	7:22:54 PM	Bypass valve opened
3/26/2011	7:22:54 PM	Helium MFC set to  0.000000
3/26/2011	7:22:54 PM	H2 MFC set to  0.000000
3/26/2011	7:22:54 PM	BCl3 MFC set to  0.000000
3/26/2011	7:22:54 PM	PHl3 MFC set to  0.000000
3/26/2011	7:22:54 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:22:54 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:22:54 PM	Tube furnace set to 0
3/26/2011	7:23:54 PM	H2 valve closed
3/26/2011	7:23:54 PM	BCl3 valve closed
3/26/2011	7:23:54 PM	PH3 valve closed
3/26/2011	7:23:54 PM	SiCl4 pre valve closed
3/26/2011	7:23:54 PM	SiCl4 post valve closed
3/26/2011	7:23:54 PM	Bubbler valve closed
3/26/2011	7:23:54 PM	Helium valve opened
3/26/2011	7:23:54 PM	Main Vac valve opened
3/26/2011	7:23:54 PM	Bypass valve opened
3/26/2011	7:23:54 PM	Helium MFC set to  100.000000
3/26/2011	7:23:54 PM	H2 MFC set to  0.000000
3/26/2011	7:23:54 PM	BCl3 MFC set to  0.000000
3/26/2011	7:23:54 PM	PHl3 MFC set to  0.000000
3/26/2011	7:23:54 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:23:54 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:23:54 PM	Tube furnace set to 0
3/26/2011	7:24:54 PM	Helium valve closed
3/26/2011	7:24:54 PM	H2 valve closed
3/26/2011	7:24:54 PM	BCl3 valve closed
3/26/2011	7:24:54 PM	PH3 valve closed
3/26/2011	7:24:54 PM	SiCl4 pre valve closed
3/26/2011	7:24:54 PM	SiCl4 post valve closed
3/26/2011	7:24:54 PM	Bubbler valve closed
3/26/2011	7:24:54 PM	Main Vac valve opened
3/26/2011	7:24:54 PM	Bypass valve opened
3/26/2011	7:24:54 PM	Helium MFC set to  0.000000
3/26/2011	7:24:54 PM	H2 MFC set to  0.000000
3/26/2011	7:24:54 PM	BCl3 MFC set to  0.000000
3/26/2011	7:24:54 PM	PHl3 MFC set to  0.000000
3/26/2011	7:24:54 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:24:54 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:24:54 PM	Tube furnace set to 0
3/26/2011	7:25:54 PM	H2 valve closed
3/26/2011	7:25:54 PM	BCl3 valve closed
3/26/2011	7:25:54 PM	PH3 valve closed
3/26/2011	7:25:54 PM	SiCl4 pre valve closed
3/26/2011	7:25:54 PM	SiCl4 post valve closed
3/26/2011	7:25:54 PM	Bubbler valve closed
3/26/2011	7:25:54 PM	Helium valve opened
3/26/2011	7:25:54 PM	Main Vac valve opened
3/26/2011	7:25:54 PM	Bypass valve opened
3/26/2011	7:25:54 PM	Helium MFC set to  100.000000
3/26/2011	7:25:54 PM	H2 MFC set to  0.000000
3/26/2011	7:25:54 PM	BCl3 MFC set to  0.000000
3/26/2011	7:25:54 PM	PHl3 MFC set to  0.000000
3/26/2011	7:25:54 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:25:54 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:25:54 PM	Tube furnace set to 0
3/26/2011	7:26:54 PM	Helium valve closed
3/26/2011	7:26:54 PM	H2 valve closed
3/26/2011	7:26:54 PM	BCl3 valve closed
3/26/2011	7:26:54 PM	PH3 valve closed
3/26/2011	7:26:54 PM	SiCl4 pre valve closed
3/26/2011	7:26:54 PM	SiCl4 post valve closed
3/26/2011	7:26:54 PM	Bubbler valve closed
3/26/2011	7:26:54 PM	Main Vac valve opened
3/26/2011	7:26:54 PM	Bypass valve opened
3/26/2011	7:26:54 PM	Helium MFC set to  0.000000
3/26/2011	7:26:54 PM	H2 MFC set to  0.000000
3/26/2011	7:26:54 PM	BCl3 MFC set to  0.000000
3/26/2011	7:26:54 PM	PHl3 MFC set to  0.000000
3/26/2011	7:26:54 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:26:54 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:26:55 PM	Tube furnace set to 0
3/26/2011	7:27:55 PM	H2 valve closed
3/26/2011	7:27:55 PM	BCl3 valve closed
3/26/2011	7:27:55 PM	PH3 valve closed
3/26/2011	7:27:55 PM	SiCl4 pre valve closed
3/26/2011	7:27:55 PM	SiCl4 post valve closed
3/26/2011	7:27:55 PM	Bubbler valve closed
3/26/2011	7:27:55 PM	Helium valve opened
3/26/2011	7:27:55 PM	Main Vac valve opened
3/26/2011	7:27:55 PM	Bypass valve opened
3/26/2011	7:27:55 PM	Helium MFC set to  100.000000
3/26/2011	7:27:55 PM	H2 MFC set to  0.000000
3/26/2011	7:27:55 PM	BCl3 MFC set to  0.000000
3/26/2011	7:27:55 PM	PHl3 MFC set to  0.000000
3/26/2011	7:27:55 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:27:55 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:27:55 PM	Tube furnace set to 0
3/26/2011	7:28:55 PM	Helium valve closed
3/26/2011	7:28:55 PM	H2 valve closed
3/26/2011	7:28:55 PM	BCl3 valve closed
3/26/2011	7:28:55 PM	PH3 valve closed
3/26/2011	7:28:55 PM	SiCl4 pre valve closed
3/26/2011	7:28:55 PM	SiCl4 post valve closed
3/26/2011	7:28:55 PM	Bubbler valve closed
3/26/2011	7:28:55 PM	Main Vac valve opened
3/26/2011	7:28:55 PM	Bypass valve opened
3/26/2011	7:28:55 PM	Helium MFC set to  0.000000
3/26/2011	7:28:55 PM	H2 MFC set to  0.000000
3/26/2011	7:28:55 PM	BCl3 MFC set to  0.000000
3/26/2011	7:28:55 PM	PHl3 MFC set to  0.000000
3/26/2011	7:28:55 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:28:55 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:28:55 PM	Tube furnace set to 0
3/26/2011	7:29:55 PM	H2 valve closed
3/26/2011	7:29:55 PM	BCl3 valve closed
3/26/2011	7:29:55 PM	PH3 valve closed
3/26/2011	7:29:55 PM	SiCl4 pre valve closed
3/26/2011	7:29:55 PM	SiCl4 post valve closed
3/26/2011	7:29:55 PM	Bubbler valve closed
3/26/2011	7:29:55 PM	Helium valve opened
3/26/2011	7:29:55 PM	Main Vac valve opened
3/26/2011	7:29:55 PM	Bypass valve opened
3/26/2011	7:29:55 PM	Helium MFC set to  100.000000
3/26/2011	7:29:55 PM	H2 MFC set to  0.000000
3/26/2011	7:29:55 PM	BCl3 MFC set to  0.000000
3/26/2011	7:29:55 PM	PHl3 MFC set to  0.000000
3/26/2011	7:29:55 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:29:55 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:29:55 PM	Tube furnace set to 0
3/26/2011	7:30:55 PM	Helium valve closed
3/26/2011	7:30:55 PM	H2 valve closed
3/26/2011	7:30:55 PM	BCl3 valve closed
3/26/2011	7:30:55 PM	PH3 valve closed
3/26/2011	7:30:55 PM	SiCl4 pre valve closed
3/26/2011	7:30:55 PM	SiCl4 post valve closed
3/26/2011	7:30:55 PM	Bubbler valve closed
3/26/2011	7:30:55 PM	Main Vac valve opened
3/26/2011	7:30:55 PM	Bypass valve opened
3/26/2011	7:30:55 PM	Helium MFC set to  0.000000
3/26/2011	7:30:55 PM	H2 MFC set to  0.000000
3/26/2011	7:30:55 PM	BCl3 MFC set to  0.000000
3/26/2011	7:30:55 PM	PHl3 MFC set to  0.000000
3/26/2011	7:30:55 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:30:55 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:30:55 PM	Tube furnace set to 0
3/26/2011	7:31:55 PM	H2 valve closed
3/26/2011	7:31:55 PM	BCl3 valve closed
3/26/2011	7:31:55 PM	PH3 valve closed
3/26/2011	7:31:55 PM	SiCl4 pre valve closed
3/26/2011	7:31:55 PM	SiCl4 post valve closed
3/26/2011	7:31:55 PM	Bubbler valve closed
3/26/2011	7:31:55 PM	Helium valve opened
3/26/2011	7:31:55 PM	Main Vac valve opened
3/26/2011	7:31:55 PM	Bypass valve opened
3/26/2011	7:31:55 PM	Helium MFC set to  100.000000
3/26/2011	7:31:55 PM	H2 MFC set to  0.000000
3/26/2011	7:31:55 PM	BCl3 MFC set to  0.000000
3/26/2011	7:31:55 PM	PHl3 MFC set to  0.000000
3/26/2011	7:31:55 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:31:55 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:31:56 PM	Tube furnace set to 0
3/26/2011	7:32:56 PM	Helium valve closed
3/26/2011	7:32:56 PM	H2 valve closed
3/26/2011	7:32:56 PM	BCl3 valve closed
3/26/2011	7:32:56 PM	PH3 valve closed
3/26/2011	7:32:56 PM	SiCl4 pre valve closed
3/26/2011	7:32:56 PM	SiCl4 post valve closed
3/26/2011	7:32:56 PM	Bubbler valve closed
3/26/2011	7:32:56 PM	Main Vac valve opened
3/26/2011	7:32:56 PM	Bypass valve opened
3/26/2011	7:32:56 PM	Helium MFC set to  0.000000
3/26/2011	7:32:56 PM	H2 MFC set to  0.000000
3/26/2011	7:32:56 PM	BCl3 MFC set to  0.000000
3/26/2011	7:32:56 PM	PHl3 MFC set to  0.000000
3/26/2011	7:32:56 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:32:56 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:32:56 PM	Tube furnace set to 0
3/26/2011	7:33:56 PM	H2 valve closed
3/26/2011	7:33:56 PM	BCl3 valve closed
3/26/2011	7:33:56 PM	PH3 valve closed
3/26/2011	7:33:56 PM	SiCl4 pre valve closed
3/26/2011	7:33:56 PM	SiCl4 post valve closed
3/26/2011	7:33:56 PM	Bubbler valve closed
3/26/2011	7:33:56 PM	Helium valve opened
3/26/2011	7:33:56 PM	Main Vac valve opened
3/26/2011	7:33:56 PM	Bypass valve opened
3/26/2011	7:33:56 PM	Helium MFC set to  100.000000
3/26/2011	7:33:56 PM	H2 MFC set to  0.000000
3/26/2011	7:33:56 PM	BCl3 MFC set to  0.000000
3/26/2011	7:33:56 PM	PHl3 MFC set to  0.000000
3/26/2011	7:33:56 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:33:56 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:33:56 PM	Tube furnace set to 0
3/26/2011	7:34:56 PM	Helium valve closed
3/26/2011	7:34:56 PM	H2 valve closed
3/26/2011	7:34:56 PM	BCl3 valve closed
3/26/2011	7:34:56 PM	PH3 valve closed
3/26/2011	7:34:56 PM	SiCl4 pre valve closed
3/26/2011	7:34:56 PM	SiCl4 post valve closed
3/26/2011	7:34:56 PM	Bubbler valve closed
3/26/2011	7:34:56 PM	Main Vac valve opened
3/26/2011	7:34:56 PM	Bypass valve opened
3/26/2011	7:34:56 PM	Helium MFC set to  0.000000
3/26/2011	7:34:56 PM	H2 MFC set to  0.000000
3/26/2011	7:34:56 PM	BCl3 MFC set to  0.000000
3/26/2011	7:34:56 PM	PHl3 MFC set to  0.000000
3/26/2011	7:34:56 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:34:56 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:34:56 PM	Tube furnace set to 0
3/26/2011	7:35:56 PM	H2 valve closed
3/26/2011	7:35:56 PM	BCl3 valve closed
3/26/2011	7:35:56 PM	PH3 valve closed
3/26/2011	7:35:56 PM	SiCl4 pre valve closed
3/26/2011	7:35:56 PM	SiCl4 post valve closed
3/26/2011	7:35:56 PM	Bubbler valve closed
3/26/2011	7:35:56 PM	Helium valve opened
3/26/2011	7:35:56 PM	Main Vac valve opened
3/26/2011	7:35:56 PM	Bypass valve opened
3/26/2011	7:35:56 PM	Helium MFC set to  100.000000
3/26/2011	7:35:56 PM	H2 MFC set to  0.000000
3/26/2011	7:35:56 PM	BCl3 MFC set to  0.000000
3/26/2011	7:35:56 PM	PHl3 MFC set to  0.000000
3/26/2011	7:35:56 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:35:56 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:35:56 PM	Tube furnace set to 0
3/26/2011	7:36:56 PM	Helium valve closed
3/26/2011	7:36:56 PM	H2 valve closed
3/26/2011	7:36:56 PM	BCl3 valve closed
3/26/2011	7:36:56 PM	PH3 valve closed
3/26/2011	7:36:56 PM	SiCl4 pre valve closed
3/26/2011	7:36:56 PM	SiCl4 post valve closed
3/26/2011	7:36:56 PM	Bubbler valve closed
3/26/2011	7:36:56 PM	Main Vac valve opened
3/26/2011	7:36:56 PM	Bypass valve opened
3/26/2011	7:36:56 PM	Helium MFC set to  0.000000
3/26/2011	7:36:56 PM	H2 MFC set to  0.000000
3/26/2011	7:36:56 PM	BCl3 MFC set to  0.000000
3/26/2011	7:36:56 PM	PHl3 MFC set to  0.000000
3/26/2011	7:36:56 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:36:56 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:36:57 PM	Tube furnace set to 0
3/26/2011	7:37:57 PM	H2 valve closed
3/26/2011	7:37:57 PM	BCl3 valve closed
3/26/2011	7:37:57 PM	PH3 valve closed
3/26/2011	7:37:57 PM	SiCl4 pre valve closed
3/26/2011	7:37:57 PM	SiCl4 post valve closed
3/26/2011	7:37:57 PM	Bubbler valve closed
3/26/2011	7:37:57 PM	Helium valve opened
3/26/2011	7:37:57 PM	Main Vac valve opened
3/26/2011	7:37:57 PM	Bypass valve opened
3/26/2011	7:37:57 PM	Helium MFC set to  100.000000
3/26/2011	7:37:57 PM	H2 MFC set to  0.000000
3/26/2011	7:37:57 PM	BCl3 MFC set to  0.000000
3/26/2011	7:37:57 PM	PHl3 MFC set to  0.000000
3/26/2011	7:37:57 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:37:57 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:37:57 PM	Tube furnace set to 0
3/26/2011	7:38:57 PM	Helium valve closed
3/26/2011	7:38:57 PM	H2 valve closed
3/26/2011	7:38:57 PM	BCl3 valve closed
3/26/2011	7:38:57 PM	PH3 valve closed
3/26/2011	7:38:57 PM	SiCl4 pre valve closed
3/26/2011	7:38:57 PM	SiCl4 post valve closed
3/26/2011	7:38:57 PM	Bubbler valve closed
3/26/2011	7:38:57 PM	Main Vac valve opened
3/26/2011	7:38:57 PM	Bypass valve opened
3/26/2011	7:38:57 PM	Helium MFC set to  0.000000
3/26/2011	7:38:57 PM	H2 MFC set to  0.000000
3/26/2011	7:38:57 PM	BCl3 MFC set to  0.000000
3/26/2011	7:38:57 PM	PHl3 MFC set to  0.000000
3/26/2011	7:38:57 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:38:57 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:38:57 PM	Tube furnace set to 0
3/26/2011	7:39:57 PM	H2 valve closed
3/26/2011	7:39:57 PM	BCl3 valve closed
3/26/2011	7:39:57 PM	PH3 valve closed
3/26/2011	7:39:57 PM	SiCl4 pre valve closed
3/26/2011	7:39:57 PM	SiCl4 post valve closed
3/26/2011	7:39:57 PM	Bubbler valve closed
3/26/2011	7:39:57 PM	Helium valve opened
3/26/2011	7:39:57 PM	Main Vac valve opened
3/26/2011	7:39:57 PM	Bypass valve opened
3/26/2011	7:39:57 PM	Helium MFC set to  100.000000
3/26/2011	7:39:57 PM	H2 MFC set to  0.000000
3/26/2011	7:39:57 PM	BCl3 MFC set to  0.000000
3/26/2011	7:39:57 PM	PHl3 MFC set to  0.000000
3/26/2011	7:39:57 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:39:57 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:39:57 PM	Tube furnace set to 0
3/26/2011	7:40:57 PM	Helium valve closed
3/26/2011	7:40:57 PM	H2 valve closed
3/26/2011	7:40:57 PM	BCl3 valve closed
3/26/2011	7:40:57 PM	PH3 valve closed
3/26/2011	7:40:57 PM	SiCl4 pre valve closed
3/26/2011	7:40:57 PM	SiCl4 post valve closed
3/26/2011	7:40:57 PM	Bubbler valve closed
3/26/2011	7:40:57 PM	Main Vac valve opened
3/26/2011	7:40:57 PM	Bypass valve opened
3/26/2011	7:40:57 PM	Helium MFC set to  0.000000
3/26/2011	7:40:57 PM	H2 MFC set to  0.000000
3/26/2011	7:40:57 PM	BCl3 MFC set to  0.000000
3/26/2011	7:40:57 PM	PHl3 MFC set to  0.000000
3/26/2011	7:40:57 PM	SiCl4 MFC set to  0.000000
3/26/2011	7:40:57 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	7:40:57 PM	Tube furnace set to 0
3/26/2011	7:40:58 PM	Run finished at 7:40 PM
3/26/2011	7:40:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/26/2011	8:03:52 PM	Helium MFC set to  0.000000
3/26/2011	8:03:52 PM	Helium valve opened
3/26/2011	8:03:56 PM	Helium MFC set to  100.000000
3/26/2011	8:04:26 PM	Helium MFC set to  0.000000
3/26/2011	8:04:27 PM	Helium valve closed
3/26/2011	8:05:41 PM	Recipe started at 8:05 PM
3/26/2011	8:05:41 PM	Helium valve closed
3/26/2011	8:05:41 PM	BCl3 valve closed
3/26/2011	8:05:41 PM	PH3 valve closed
3/26/2011	8:05:41 PM	SiCl4 pre valve closed
3/26/2011	8:05:41 PM	SiCl4 post valve closed
3/26/2011	8:05:41 PM	Main Vac valve closed
3/26/2011	8:05:41 PM	Bypass valve closed
3/26/2011	8:05:41 PM	Bubbler valve closed
3/26/2011	8:05:41 PM	H2 valve opened
3/26/2011	8:05:41 PM	Helium MFC set to  0.000000
3/26/2011	8:05:41 PM	H2 MFC set to  500.000000
3/26/2011	8:05:41 PM	BCl3 MFC set to  0.000000
3/26/2011	8:05:41 PM	PHl3 MFC set to  0.000000
3/26/2011	8:05:41 PM	SiCl4 MFC set to  0.000000
3/26/2011	8:05:41 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	8:05:41 PM	Tube furnace set to 0
3/26/2011	8:07:00 PM	Helium valve closed
3/26/2011	8:07:00 PM	BCl3 valve closed
3/26/2011	8:07:00 PM	PH3 valve closed
3/26/2011	8:07:00 PM	SiCl4 pre valve closed
3/26/2011	8:07:00 PM	SiCl4 post valve closed
3/26/2011	8:07:00 PM	Main Vac valve closed
3/26/2011	8:07:00 PM	Bypass valve closed
3/26/2011	8:07:00 PM	H2 valve opened
3/26/2011	8:07:00 PM	Bubbler valve opened
3/26/2011	8:07:00 PM	Helium MFC set to  0.000000
3/26/2011	8:07:00 PM	H2 MFC set to  500.000000
3/26/2011	8:07:00 PM	BCl3 MFC set to  0.000000
3/26/2011	8:07:00 PM	PHl3 MFC set to  0.000000
3/26/2011	8:07:00 PM	SiCl4 MFC set to  0.000000
3/26/2011	8:07:00 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	8:07:00 PM	Tube furnace set to 1050
3/26/2011	8:27:00 PM	Helium valve closed
3/26/2011	8:27:00 PM	BCl3 valve closed
3/26/2011	8:27:00 PM	PH3 valve closed
3/26/2011	8:27:00 PM	Main Vac valve closed
3/26/2011	8:27:00 PM	Bypass valve closed
3/26/2011	8:27:00 PM	H2 valve opened
3/26/2011	8:27:00 PM	SiCl4 pre valve opened
3/26/2011	8:27:00 PM	SiCl4 post valve opened
3/26/2011	8:27:00 PM	Bubbler valve opened
3/26/2011	8:27:00 PM	Helium MFC set to  0.000000
3/26/2011	8:27:00 PM	H2 MFC set to  500.000000
3/26/2011	8:27:00 PM	BCl3 MFC set to  0.000000
3/26/2011	8:27:00 PM	PHl3 MFC set to  0.000000
3/26/2011	8:27:00 PM	SiCl4 MFC set to  50.000000
3/26/2011	8:27:00 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	8:27:00 PM	Tube furnace set to 1050
3/26/2011	8:47:00 PM	H2 valve closed
3/26/2011	8:47:00 PM	BCl3 valve closed
3/26/2011	8:47:00 PM	PH3 valve closed
3/26/2011	8:47:00 PM	SiCl4 pre valve closed
3/26/2011	8:47:00 PM	SiCl4 post valve closed
3/26/2011	8:47:00 PM	Main Vac valve closed
3/26/2011	8:47:00 PM	Bypass valve closed
3/26/2011	8:47:00 PM	Helium valve opened
3/26/2011	8:47:00 PM	Bubbler valve opened
3/26/2011	8:47:00 PM	Helium MFC set to  500.000000
3/26/2011	8:47:00 PM	H2 MFC set to  0.000000
3/26/2011	8:47:00 PM	BCl3 MFC set to  0.000000
3/26/2011	8:47:00 PM	PHl3 MFC set to  0.000000
3/26/2011	8:47:00 PM	SiCl4 MFC set to  0.000000
3/26/2011	8:47:00 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	8:47:00 PM	Tube furnace set to 0
3/26/2011	9:07:00 PM	Helium valve closed
3/26/2011	9:07:00 PM	H2 valve closed
3/26/2011	9:07:00 PM	BCl3 valve closed
3/26/2011	9:07:00 PM	PH3 valve closed
3/26/2011	9:07:00 PM	SiCl4 pre valve closed
3/26/2011	9:07:00 PM	SiCl4 post valve closed
3/26/2011	9:07:00 PM	Main Vac valve closed
3/26/2011	9:07:00 PM	Bypass valve closed
3/26/2011	9:07:00 PM	Bubbler valve closed
3/26/2011	9:07:00 PM	Helium MFC set to  0.000000
3/26/2011	9:07:00 PM	H2 MFC set to  0.000000
3/26/2011	9:07:00 PM	BCl3 MFC set to  0.000000
3/26/2011	9:07:00 PM	PHl3 MFC set to  0.000000
3/26/2011	9:07:00 PM	SiCl4 MFC set to  0.000000
3/26/2011	9:07:00 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	9:07:00 PM	Tube furnace set to 0
3/26/2011	9:07:01 PM	Run finished at 9:07 PM
3/26/2011	9:15:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2011	9:15:18 PM	Recipe started at 9:15 PM
3/26/2011	9:15:18 PM	Helium valve closed
3/26/2011	9:15:18 PM	H2 valve closed
3/26/2011	9:15:18 PM	BCl3 valve closed
3/26/2011	9:15:18 PM	PH3 valve closed
3/26/2011	9:15:18 PM	SiCl4 pre valve closed
3/26/2011	9:15:18 PM	SiCl4 post valve closed
3/26/2011	9:15:18 PM	Main Vac valve closed
3/26/2011	9:15:18 PM	Bubbler valve closed
3/26/2011	9:15:18 PM	Bypass valve opened
3/26/2011	9:15:18 PM	Helium MFC set to  0.000000
3/26/2011	9:15:18 PM	H2 MFC set to  0.000000
3/26/2011	9:15:18 PM	BCl3 MFC set to  0.000000
3/26/2011	9:15:18 PM	PHl3 MFC set to  0.000000
3/26/2011	9:15:18 PM	SiCl4 MFC set to  0.000000
3/26/2011	9:15:18 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	9:15:18 PM	Tube furnace set to 0
3/26/2011	9:15:49 PM	Helium valve closed
3/26/2011	9:15:49 PM	H2 valve closed
3/26/2011	9:15:49 PM	BCl3 valve closed
3/26/2011	9:15:49 PM	PH3 valve closed
3/26/2011	9:15:49 PM	SiCl4 pre valve closed
3/26/2011	9:15:49 PM	SiCl4 post valve closed
3/26/2011	9:15:49 PM	Bubbler valve closed
3/26/2011	9:15:49 PM	Main Vac valve opened
3/26/2011	9:15:49 PM	Bypass valve opened
3/26/2011	9:15:49 PM	Helium MFC set to  0.000000
3/26/2011	9:15:49 PM	H2 MFC set to  0.000000
3/26/2011	9:15:49 PM	BCl3 MFC set to  0.000000
3/26/2011	9:15:49 PM	PHl3 MFC set to  0.000000
3/26/2011	9:15:49 PM	SiCl4 MFC set to  0.000000
3/26/2011	9:15:49 PM	Bypass solenoid MFC set to  0.000000
3/26/2011	9:15:49 PM	Tube furnace set to 0
3/26/2011	9:15:49 PM	Run finished at 9:15 PM
3/26/2011	9:15:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
